ITO/Pt复合薄膜应变计制备及耐高温性能研究  

Fabrication and High Temperature Performance Study of ITO/Pt Composite Film Strain Gauge

作　　者：姚雪 李硕林 谭秋林[1] 张磊[1] 董和磊[1] YAO Xue;LI Shuo-lin;TAN Qiu-lin;ZHANG Lei;DONG He-lei(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]省部共建动态测试技术国家重点实验室,中北大学,山西太原030051

出　　处：《仪表技术与传感器》2022年第5期32-36,41,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(52175525);山西省应用基础研究计划青年项目(20210302124274);山西省“1331工程”重点学科建设基金资助项目。

摘　　要：针对极端环境下发动机涡轮叶片的应变测试需求,采用脉冲激光沉积和磁控溅射的镀膜工艺在氧化铝陶瓷基底上制备了以ITO/Pt复合薄膜为应变层的高温薄膜应变计,并研究了复合薄膜中ITO薄膜与Pt薄膜的厚度比对ITO/Pt复合薄膜应变计耐高温性能的影响。研究表明,复合薄膜厚度比为5.5∶1时,ITO/Pt复合薄膜应变计在高温(1200℃)环境下具有比较稳定的电阻温度系数(TCR),为564.52×10^(-6)℃^(-1)。此外,还对ITO/Pt复合薄膜应变计常温下的电阻随应变的变化情况进行了测试,测试结果表明,应变计的电阻随应变呈线性变化,其应变灵敏系数(GF)为3.10。To meet the demand for strain testing of engine turbine blades in extreme environments,a high temperature thin film strain gauge with ITO/Pt composite film as strain layer was prepared on alumina ceramic substrate by pulse laser deposition and magnetron sputtering.The effect of the thickness ratio of ITO and Pt films in the composite films on the high-temperature resistance of ITO/Pt composite thin-film strain gauges was investigated.The result shows that the ITO/Pt composite thin film strain gauge has a relatively stable temperature coefficient of resistance(TCR)at high temperature(1200℃)when the thickness ratio of the composite film is 5.5:1,the TCR is 564.52×10^(-6)℃^(-1).In addition,the resistance of the ITO/Pt composite thin film strain gauge at room temperature with strain was also tested.The test results show that the resistance of the strain gauge varies linearly with strain,and its strain sensitivity factor(GF)is 3.10.

关 键 词：薄膜应变计 脉冲激光沉积 磁控溅射 耐高温性能 电阻温度系数 应变灵敏系数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]