基于铌酸锂薄膜的Y波导集成调制器设计  

Design of a novel Y-junction electro-optic modulator based on thin film lithium niobite

作　　者：郭宏杰 刘海锋 王振诺 谭满清[1,3] 李智勇 雷明[4] 郭文涛 GUO Hong-Jie;LIU Hai-Feng;WANG Zhen-Nuo;TAN Man-Qing;LI Zhi-Yong;Lei Ming;GUO Wen-Tao(State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;National Engineering Research Center for Optoelectronic Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-electronics Technology,University of Chinese Academy of Sciences,Beijing 100049,China;State Key Laboratory of Inertial Technology,Beijing Institute of Automatic Control Equipment,Beijing 100074,China)

机构地区：[1]中国科学院半导体研究所集成光电子国家重点实验室,北京100083 [2]中国科学院半导体研究所光电子器件国家工程研究中心,北京100083 [3]中国科学院大学材料科学与光电工程中心,北京100049 [4]北京自动控制设备研究所国家重点惯性技术实验室,北京100074

出　　处：《红外与毫米波学报》2022年第3期626-630,共5页Journal of Infrared and Millimeter Waves

基　　金：Supported by Science and Technology Project of State Grid Corporation of China(No.5700-202058482A-0-0-00);National Key Research and Development Program of China(No.2019YFB2203802)。

摘　　要：近年来,基于薄膜铌酸锂(TFLN)平台的高性能电光调制器以其小体积、低能量损耗等特点受到广泛关注。本文提出了一种新的具有垂直电极结构的Y波导铌酸锂薄膜电光调制器。研究了调制器的半波电压与缓冲层厚度之间的关系,优化了Y波导的设计参数,最后设计得到插入损耗<5 dB,半波电压<1.5 V的高性能调制器。本文不仅为基于TFLN平台的小型化波导的设计和实现提供了思路,而且为制造高性能和多功能的电光调制器提供了实验依据。In recent years,the high-performance electro-optic modulator based on the thin-film lithium niobate(TFLN)platform has been receiving considerable attention due to the featuring small footprint and low energy loss.In this paper,a novel Y-junction electro-optic modulator with a vertical electrode structure was designed based on TFLN.The relationship between the low half-wave voltage and the buffer layer thickness for the novel modulator was investigated.Meanwhile,the design parameters of Y-junction were optimized,and found that the half-wave voltage is less than 1.5 V and the insertion loss is less than 5 dB.Finally,the Y-junction electro-optic modulator was fabricated.This study not only provides insights on the design and realization of compact footprint photonic waveguides in the TFLN platform but also,experimental evidence for the fabrication of electro-optic modulators with high-performance and multifunction.

关 键 词：电光调制器 TFLN Y波导 

分 类 号：TN29[电子电信—物理电子学]