电弧离子镀制备TiN/TiSiN多层涂层及其性能研究  

Preparation and Properties of TiN/TiSiN Multilayer Coatings by Arc Ion Plating

作　　者：刘怡飞[1] 宋启萌 李助军[1] 田灿鑫 LIU Yifei;SONG Qimeng;LI Zhujun;TIAN Canxin(School of Mechanical and Eletronics,Guangzhou Railway Polytechnic,Guangnzhou Guangdong 510430,China;Department of Physics Science and Technology,Lingnan Normal University,Zhanjiang Guangdong 524048,China)

机构地区：[1]广州铁路职业技术学院机电工程学院,广东广州510430 [2]岭南师范学院物理科学与技术学院,广东湛江524048

出　　处：《润滑与密封》2022年第6期116-122,共7页Lubrication Engineering

基　　金：2021年“攀登计划”广东大学生科技创新培育重点项目(pdjh2021a0871);第一批广州市高等职业教育双师工作室、2020年度普通高校重点科研项目(2020ZDZX2089)。

摘　　要：为提高单一TiN涂层的性能,采用AS600DMTXBE型阳极层离子源辅助电弧离子镀系统制备TiN层和TiSiN层厚度比分别为1∶2、2∶2、3∶1的TiN/TiSiN多层涂层。研究不同厚度比的TiN/TiSiN多层涂层的形貌、结构以及性能,并与TiN涂层性能进行比较。结果表明:TiN/TiSiN多层涂层为TiN面心立方结构,其中厚度比为2∶2的TiN/TiSiN多层涂层的TiN(111)衍射峰较强;厚度比为1∶2的TiN/TiSiN多层涂层摩擦因数最低,表明掺入Si的含量越大,涂层减摩性能越好;TiN/TiSiN多层涂层的减摩作用、硬度和结合强度都优于TiN涂层,且厚度比为2∶2的TiN/TiSiN多层涂层的硬度和结合强度均最大;厚度比为2∶2的TiN/TiSiN多层涂层的耐腐蚀性最高,表明Si元素的掺入能够提升涂层的耐腐蚀性能。In order to improve the performance of monolayer TiN coating,TiN/TiSiN multilayer coatings with thickness ratios of 1∶2,2∶2 and 3∶1 was prepared by AS600 DMTXBE arc ion plating system assisted by anodic layer ion source.The morphology,composition and mechanical properties of TiN/TiSiN multilayer coatings were studied and compared with TiN coating.The results show that TiN/TiSiN multilayer coatings have a face-centered cubic structure,and the TiN/TiSiN multilayer coating with thickness ratio of 2∶2 has a strongest diffraction peak of TiN(111).The TiN/TiSiN multilayer coating with thickness ratio of 1∶2 has the lowest friction coefficient,indicating that the greater the content of Si,the better the antifriction performance of the coating.The antifriction,hardness and bonding strength of TiN/TiSiN multilayer coatings are better than those of TiN coating,and the hardness and bonding strength of TiN/TiSiN multilayer coating with thickness ratio of 2∶2 are the largest.The TiN/TiSiN multilayer coating with thickness ratio of 2∶2 has the highest corrosion resistance,indicating that the addition of Si can improve the corrosion resistance of the coating.

关 键 词：电弧离子镀 TiN/TiSiN多层涂层 TIN涂层 硬度 摩擦学性能 

分 类 号：TH117.1[机械工程—机械设计及理论] TG174.444[金属学及工艺—金属表面处理]