Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review  

作　　者：Shengping Liu Junbo Feng Ye Tian Heng Zhao Li Jin Boling Ouyang Jiguang Zhu Jin Guo 

机构地区：[1]Chongqing United Microelectronics Center,Chongqing 401332,China

出　　处：《Frontiers of Optoelectronics》2022年第1期92-112,共21页光电子前沿（英文版）

基　　金：This work was supported by Chuan-Yu Cooperation Project(No.Cstc2020jscx-cy1hX0006);Chongqing Science and Technology Commission of China(Grant No.cstc2020jscx-msxm0099 and cstc2020jscx-msxm0100);Chongqing Natural Science Foundation of China(No.cstc2020jcyj-msxm3725).

摘　　要：Silicon photonic platforms offer relevance to large markets in many applications,such as optical phased arrays,photonic neural networks,programmable photonic integrated circuits,and quantum computation devices.As one of the basic tuning devices,the thermo-optic phase shifter(TOPS)plays an important role in all these applications.A TOPS with the merits of easy fabrication,low power consumption,small thermal time constant,low insertion loss,small footprint,and low crosstalk,is needed to improve the performance and lower the cost of the above applications.To meet these demands,various TOPS have been proposed and experimentally demonstrated on different foundry platforms In this paper,we review the state-of-the-art of TOPS,including metal heater,doped silicon,silicide,with silicon substrate undercut for heat insulation,folded waveguide structure,and multi-pass waveguide structure.We further compare these TOPSs and propose the directions of the future developments on TOPS.

关 键 词：Thermo-optic phase shifter Photonic integrated circuits(PICs) Optical switches Silicon photonics 

分 类 号：TN2[电子电信—物理电子学]