Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line  

作　　者：Galina Georgieva Christian Mai Pascal M.Seiler Anna Peczek Lars Zimmermann 

机构地区：[1]Hochfrequenztechnik-Photonik/Siliziumphotonik,Technische Universität Berlin,Straße des 17.Juni 135,10623 Berlin,Germany [2]IHP-Leibnitz Institut für innovative Mikroelektronik,Im Technologiepark 25,15236 Frankfurt(Oder),Germany [3]IHP Solutions GmbH,Im Technologiepark 7,15236 Frankfurt(Oder),Germany

出　　处：《Frontiers of Optoelectronics》2022年第1期143-155,共13页光电子前沿（英文版）

基　　金：This work was supported in part by the German Research Foundation(DFG)through the projects EPIC-Sense(ZI 1283-6-1);EPIDAC(ZI 1283-7-1);the Federal Ministry of Education and Research(BMBF)through project PEARLS(13N14932).

摘　　要：In this paper,we report on polarization combining two-dimensional grating couplers(2D GCs)on amorphous Si:H,fabricated in the backend of line of a photonic BiCMOS platform.The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter,which can be implemented on bulk Si wafers.The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of−5 dB with a wafer variation of±1.2 dB.Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated.

关 键 词：Hybrid integration Photonic BiCMOS Amorphous silicon Two-dimensional grating coupler(2D GC) Dual-polarization coherent communication Silicon photonics 

分 类 号：TN2[电子电信—物理电子学]