成型工艺对氮氧化铝微观结构和性能的影响  

Effect of forming process on microstructures and properties of aluminum oxynitride

作　　者：李海龙[1,2] 闵攀 冯钊 鲜浩 刘红[1] 方敬忠[1] Li Hailong;Min Pan;Feng Zhao;Xian Hao;Liu Hong;Fang Jingzhong(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《光电工程》2022年第6期20-30,共11页Opto-Electronic Engineering

摘　　要：氮氧化铝(AlON)透明陶瓷具有优异的光学、热学和机械性能,可广泛应用于光电窗口、整流罩、透明装甲等领域。成型高致密度、结构均匀的素坯是制备氮氧化铝透明陶瓷的关键技术环节。但是纳米粉体比表面积大,易产生非均匀团聚,导致成型坯体致密度差。为了提高素坯密度和均匀性,本文首先通过优化喷雾造粒工艺实现纳米粉体微球化,获得直径大于10μm、具有良好流动性的致密球形颗粒。然后分析成型压力对素坯的密度、微观结构、平均孔径及陶瓷性能的影响,得到相对密度58.8%的素坯,烧结陶瓷片在200 nm处直线透过率达到83%(厚度2 mm)。最后采用冷等静压成型/常压烧结技术制备出Φ170 mm平板和Φ110 mm球罩样件。AlON transparent ceramic is a new structure-function integration optical material with excellent optical,thermal,and mechanical properties,which can be widely used in missile domes,and transparent armors and other fields.The preparation of green body with high density and homogeneous microstructure is the key technical procedure for fabricating AlON transparent ceramic.However,nanopowders possess high specific surface area and are easy to form non-uniform agglomeration,resulting in poor density of formed green body.In order to improve density and homogeneity of green body,micro-spheroidization of nanopowders and dense spherical particles with a diameter greater than 10μm and good fluidity were obtained by optimizing the spray granulation process.The effect of cold isostatic pressing pressure on density,microstructure,average pore diameter of green bodies,and optical transmittance of sintered ceramics were intensively investigated.Green bodies with relative density of 58.8%were obtained.The in-line transmittance of sintered ceramics reached 83%at 2000 nm(thickness 2 mm).AlON transparent ceramics with diameter ofΦ170 mm plate andΦ110 mm dome were obtained by cold isostatic pressing and pressureless sintering.

关 键 词：AlON透明陶瓷 喷雾造粒 冷等静压 常压烧结 光学性能 

分 类 号：TQ174.758.23[化学工程—陶瓷工业]