NIKON NSR步进重复光刻机对准原理及典型故障修复  

Theory of Alignment System of NIKON NSR Step-repeat Lithography and Typical Faults Repair

作　　者：申强[1] 刘磊 曹鑫 李远林 SHEN Qiang;LIU Lei;CAO Xin;LI Yuanlin(The 55^(th) Research Institute of CETC,Nanjing 210016,China)

机构地区：[1]中国电子科技集团公司第五十五研究所,江苏南京210016

出　　处：《电子工业专用设备》2022年第1期30-35,共6页Equipment for Electronic Products Manufacturing

摘　　要：论述了NIKON NSR步进重复光刻机对准系统工作原理,包括掩模版对准和圆片对准;列出了对准过程中遇到的常见故障,并提出了对应的解决方法,对设备运行过程中出现的对准方面的故障修复有一定的指导作用。This paper mainly demonstrates the working theory of alignment system of NIKON NSR step-repeat lithography,including reticle alignment and wafer alignment.Common faults encountered during alignment are listed and the corresponding solutions are proposed.It has certain guiding role for the error repair of alignment in the process of equipment operation.

关 键 词：对准系统 掩模版对准 圆片对准 故障修复 

分 类 号：TN305.7[电子电信—物理电子学]