膜片式光纤动态压力传感器的研制  

Development of diaphragm-type optical fiber dynamic pressure sensors

作　　者：张慧君[1] ZHANG Huijun(Changcheng Institute of Metrology&Measurement,Beijing 100095,China)

机构地区：[1]航空工业北京长城计量测试技术研究所,北京100095

出　　处：《计测技术》2022年第3期30-35,共6页Metrology & Measurement Technology

基　　金：工信部民用飞机专项科研项目(MJ-2015-J-99)。

摘　　要：为了更好地满足动态压力的测量需求,研究了一种基于法布里-珀罗(Fabry-Perot,F-P)干涉原理的膜片式光纤动态压力传感器。从理论上分析了多个反射面对F-P腔光谱的影响,提出了得到单一F-P腔的方法。进而采用机械研磨的方式对传感器膜片外表面进行粗化加工,有效解决了由多个反射面带来的光谱复杂问题。对传感器进行静态压力和动态压力标定试验,结果表明:传感器性能良好,在0~200 kPa(表压)范围内的静态压力测量误差小于等于0.5%FS;在20~2500 Hz范围内,传感器的幅值灵敏度相对误差优于±10%。In order to meet the demodulation requirements of dynamic pressure better,a diaphragm-type optical fiber dynamic pressure sensor based on Fabry-Perot(F-P)interference principle is studied.The influence of multiple reflective surfaces on the spectrum of the F-P cavity is theoretically analyzed,and a method is proposed to obtain a single F-P cavity.The outer surface of the sensor diaphragm is roughened by mechanical grinding,which effectively solves the complex spectrum problem caused by multiple reflective surfaces.Static pressure and dynamic pressure calibration tests are carried out on the sensor,and the results show that the sensor performs well.The static pressure measurement error of the sensor in the range of 0-200 kPa(gauge pressure)is not more than 0.5%FS,and the amplitude sensitivity relative error of the sensor does not exceed±10%within the range of 20~2500 Hz.

关 键 词：光纤传感器 F-P腔 动态压力 

分 类 号：TB935[一般工业技术—计量学] TP212[机械工程—测试计量技术及仪器]