沉积时间对真空离子镀TiC涂层微磨具表面性能的影响  

Effect of Deposition Time on the Surface Properties of Vacuum Ion Plating TiC Coated Micro-grinding Tools

作　　者：温雪龙 韩凤兵 巩亚东[1] 黄雄俊 WEN Xue-long;HAN Feng-bing;GONG Ya-dong;HUANG Xiong-jun(School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,China.)

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110819

出　　处：《东北大学学报（自然科学版）》2022年第6期857-863,共7页Journal of Northeastern University(Natural Science)

基　　金：国家自然科学基金资助项目(51775100);中央高校基本科研业务费专项资金资助项目(N2103023)。

摘　　要：采用真空电弧离子镀膜方法进行微磨具表面涂层制备实验研究,实验选择不同沉积时间做单因素实验进行涂层制备.分析了不同沉积时间的涂层物相组成,研究了不同沉积时间对涂层表面形貌的影响规律,探讨了其对摩擦系数和粗糙度的影响变化规律,以及对涂层厚度的影响规律,选出合理的沉积时间制备涂层微磨具.实验结果表明:钛镀层和金刚石发生界面反应,形成稳定的碳化钛层;随着沉积时间增加,摩擦系数不断增加,而粗糙度逐渐降低,涂层厚度逐渐增加.研究结果为涂层微磨具制备与提高微磨具的耐磨性和使用寿命提供了理论参考和实验依据.The vacuum arc ion plating method is utilized to conduct experimental research on the preparation of micro-grinding tools surface coatings,and the single factor experiment is conducted to prepare the coating at different deposition time.The phase composition of the coating at different deposition time is analyzed,the effect of different deposition time on the surface morphology of the coating is studied,the changes in friction coefficient and roughness,as well as the effect on the thickness of the coating are discussed,and the reasonable deposition time is selected to prepare coated micro-grinding tools.The experimental results show that the interface reaction between the titanium coating and the diamond forms a stable titanium carbide layer,and as the deposition time increases,the friction coefficient continues to increase,and the roughness gradually decreases,and the coating thickness gradually increases.The research results provide a theoretical reference and experimental basis for the preparation and improvement of wear resistance and service life of coated micro-grinding tools.

关 键 词：沉积时间 物相组成 涂层形貌 摩擦系数 粗糙度 涂层厚度 

分 类 号：TH161[机械工程—机械制造及自动化]