临界反应距离法微细电化学高效加工大长径比微电极  

Micro electrical chemical machining for efficient fabricating large aspect ratio micro electrodes by critical gap method

作　　者：彭子龙[1,2] 刘聪 李一楠[1,2] 兰红波[1,2] PENG Zilong;LIU Cong;LI Yinan;LAN Hongbo(Shandong Engineering Research Center for Additive Manufacturing,Qingdao University of Technology,Qingdao 266520,China;Key Lab of Industrial Fluid Energy Conservation and Pollution Control,Ministry of Education,Qingdao University of Technology,Qingdao 266520,China)

机构地区：[1]青岛理工大学山东省增材制造工程技术研究中心,青岛266520 [2]青岛理工大学工业流体节能与污染控制教育部重点实验室,青岛266520

出　　处：《航空学报》2022年第4期307-317,共11页Acta Aeronautica et Astronautica Sinica

基　　金：国家自然科学基金(51875300,51871128);山东省自然科学基金重大基础研究项目(ZR2020ZD04);山东省自然科学基金(ZR2017MEE012,ZR2018MEE017)。

摘　　要：提出了一种基于临界反应距离控制的微细电化学(μ-ECM)在线高效制备大长径比微电极方法,旨在解决大长径比微电极制备难题。采用强碱性电解液及微秒级电源,实现了钨电极的微米级精度可控去除。分析了微细电化学加工材料去除微观过程,仿真分析了两极距离变化条件下间隙电流密度变化,确定了基于临界反应距离精确控制材料去除的参数选择范围。建立了电极材料蚀除过程数学模型,得到了材料蚀除量的变化规律。进行了系统的工艺实验,研究了电压、脉宽、电解液浓度对微细电极材料去除率的影响规律。采用优化的工艺参数,得到了直径10μm、长径比大于200的微细电极,材料去除率最高可达2.7×10^(-2)mm^(3)/min,加工效率较目前主流方法提高一个数量级。A micro Electrical Chemical Machining(μ-ECM)method based on critical gap control for efficient fabricating micro electrodes with large aspect ratio was proposed.Using strong alkaline electrolyte and microsecond power supply,the micron level precise removal of tungsten electrode can be controlled.The micro process of material removal inμ-ECM was analyzed.The process parameters for precise control of material removal based on critical gap have been determined by simulating the gap current density of different gap distance.The mathematical model of electrode material removal process was established,and the material removal law was obtained.The effects of gap voltage,pulse width and electrolyte concentration on the removal rate of micro electrode materials were studied.As a result,a micro electrode with diameter of 10μm and aspect ratio of more than 200 was obtained by using the optimized process parameters.The maximum material removal rate can reach 2.7×10^(-2)mm^(3)/min,which is an order of magnitude higher than the current other methods.

关 键 词：临界反应距离 微细电化学 微电极 大长径比 高效去除 

分 类 号：V216.5/TG662[航空宇航科学与技术—航空宇航推进理论与工程]