基于晶圆级封装的W波段微同轴天线小型化设计与实现  

Miniaturization Design and Implementation of W-Band Micro-Coaxial Antenna Based on Wafer-Level Packaging

作　　者：刘博源 江云 黄昭宇 陈嘉贝 叶源 季鹏飞 许庆华 吴微微[1] 黄敬健 袁乃昌[1] LIU Bo-yuan;JIANG Yun;HUANG Zhao-yu;CHEN Jia-bei;YE Yuan;JI Peng-fei;XU Qing-hua;WU Wei-wei;HUANG Jing-jian;YUAN Nai-chang(CEMEE SKL,School of Electronic Science,National University of Defense Technology,Changsha,Hunan 410073,China;Xianfeng Electronic Information Co.,Ltd,Sanjiang Aerospace,Xiaogan,Hubei 432000,China)

机构地区：[1]国防科技大学电子科学学院CEMEE国家重点实验室,湖南长沙410073 [2]湖北三江航天险峰电子信息有限公司,湖北孝感432000

出　　处：《电子学报》2022年第5期1098-1106,共9页Acta Electronica Sinica

基　　金：国防预研项目(No.AD1.235.00032)。

摘　　要：空气微同轴是一种以空气作为填充介质的波导结构,波导壁周期性开窗,内导体由稀疏介质带支撑,具备频带宽、隔离度高、尺寸小的特点,可以实现三维高密度系统集成.本文结合空气微同轴的超宽带特性,考虑到其天线/电路一体可加工易级联,利用CST、HFSS等软件,得到了W波段微同轴天线模型.实际加工出对应微同轴天线实物.测试结果显示,在中心频率94 GHz,实现了反射系数低于-10 dB的宽带特性.在毫米波频段内得到天线单元增益值超过7 dBi、组阵后增益大于12 dBi的工作性能,后者E面3 dB波束宽度超过20°.此晶圆级封装的毫米波天线相比传统介质波导天线缩小100倍,可以批量高精度加工,适合在诸多毫米波模块中应用和推广.The air micro-coax is a kind of structure with air as the filling medium,where its waveguide wall is periodically windowed,and the inner conductor is supported by the sparse medium belt.Its characteristics include wide frequency band,high isolation,small size,and being able to achieve three-dimensional high-density system integration.In connection with air micro-coax’s features of ultra wide band(UWB),this paper considered that its antenna/circuit integration was processible and easily cascaded.W-band micro-coaxial antenna models were obtained by modeling and simulation with CST,HFSS.Corresponding micro-coaxial antennas were fabricated.The test results showed that at 94 GHz central frequency,reflection coefficient was lower than-10 dB.Working performance of the gain value of the antenna unit with over 7 dB and that of arrayed antenna over 12 dB were realized in the millimeter wave frequency band,and the 3 dB beam width of the latter one on E-field was beyond 20°.The millimeter wave antenna packaged at the wafer-level is 100 times smaller than the traditional dielectric waveguide antenna,and can be processed in batches with high precision.The design can be applied and popularized in many millimeter wave modules.

关 键 词：微同轴 小型化 W波段 天线 阵列 晶圆级 辐射特性 

分 类 号：O43[机械工程—光学工程]