一种采用TP型分光核心的动态干涉仪  

A dynamic interferometer with TP type spectroscopic core

作　　者：马义鹏 王青[1] 王子瀚 朱宏钰 MA Yipeng;WANG Qing;WANG Zihan;ZHU Hongyu(School of Electronic Engineering and Optoelectronic Technology,Nanjing University of Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学技术》2022年第3期286-290,共5页Optical Technique

基　　金：国家自然科学基金(61875087)。

摘　　要：为了消除Michelon测量光路中PBS胶合层所引入的寄生条纹误差,提出了一种以TP(Twin-PBS)结构为分光核心的动态干涉光路。结构以Mach-Zehnder光路为起点,融合同步移相的偏振光学需求、开放的外部测量臂需求、紧凑化与调校便利性需求以及测试光束和参考光束只在PBS内的镀膜面进行分光的需求。采用琼斯矩阵构建了偏振光传输模型,通过Zemax等软件的仿真模拟,对新式光路进行了紧凑化设计和调校工艺流程设计,压缩了调校步骤。最后利用配置光源组件、成像组件、模块化光路与偏振CCD构成的TP型动态干涉仪对三反系统进行了镀膜前预测量,实现了(4%);极弱反射光下的精密测量。In order to eliminate the parasitic fringe error introduced by PBS adhesive layer in michelon’s measurement optical path,a dynamic interference optical path with TP(twin PBS)structure as the light splitting core is proposed.Starting from the Mach Zehnder optical path,the structure integrates the polarization optical requirements of synchronous phase-shifting,the requirements of open external measuring arm,the requirements of compactness and adjustment convenience,and the requirements that the test beam and reference beam are separated only on the coating surface in PBS.The polarized light transmission model is constructed by Jones matrix.Through the simulation of ZEMAX and other software,the compact design and adjustment process flow of the new optical path are designed,and the adjustment steps are compressed.Finally,the TP dynamic interferometer composed of light source module,imaging module,modular optical path and polarization CCD is used to pre measure the three mirror system before coating,and the precision measurement under(4%)~3 extremely weak reflected light is realized.

关 键 词：Twin-PBS 同步移相 偏振干涉 动态干涉仪 三反系统 

分 类 号：TH744[机械工程—光学工程]