倾斜入射下的单截面平面度绝对检验  

Single-section absolute flatness testing using oblique incidence method

作　　者：韩林沛 王青[1] HAN Linpei;WANG Qing(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学仪器》2022年第3期8-13,共6页Optical Instruments

基　　金：国家自然科学基金(61875087)。

摘　　要：针对大尺寸光学平面的直线度的纳米级测量精度需求,提出了倾斜入射下单截面平面度绝对检验方法,实现了对超过相移干涉仪口径的长平晶绝对检验。利用棱镜转向实现倾斜入射角度的精密预标定,棱镜标定角度的精度高于圆光栅和图像分析等方法,可提高测量不确定度到0.0042μm。对比了常规三面互检绝对检验结果与本方法的差异,在相同尺寸下,直线度误差仅为1.2 nm。在确认标定反射镜位置后,整个倾斜入射的干涉图调整过程将被完全集中到待测长平晶的工作面上,不需要再对反射平晶进行操作。调整长平晶时各个维度的操作互不干涉,可快速简便地得到测量结果。In order to satisfy the nanometer measurement accuracy requirements of the straightness of large-scale optical planes,a method of single-section flatness testing based on oblique incidence is proposed.The absolute inspection of long optical flat is realized which is beyond the aperture of phase-shift interferometer.It can detect long optical flat beyond the aperture of phase-shift interferometer,using right angle prism can get precise pre-calibration of oblique incidence angle,which is higher than that using circular grating,image analysis and other methods.The measurement uncertainty can be improved to 0.0042μm.By comparing the absolute testing results of three-sided mutual inspection and this method,the straightness error is 1.2 nm.After calibrating the mirror position,it is completely concentrated on the working aperture of long optical flat to be measured after the adjustment of the oblique incidence interferogram.There is no need to operate on the reflection optical flat.The operations of each dimension do not interfere with each other.Theresults can be obtained quickly and simply.

关 键 词：光学计量 倾斜入射 平面度 绝对检验 二次反射棱镜 

分 类 号：TB92[一般工业技术—计量学]