超高品质因子晶体谐振腔制备及棱镜耦合封装  

Fabrication of Ultra-High Optical Quality Factor Crystalline Resonator and Prism Coupling Package

作　　者：邢恩博 李江龙 戎佳敏 唐军 刘俊 XING Enbo;LI Jianglong;RONG Jiamin;TANG Jun;LIU Jun(School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051

出　　处：《测试技术学报》2022年第4期277-280,共4页Journal of Test and Measurement Technology

基　　金：国家自然科学基金青年基金资助项目(52005457,62004179);山西省青年科学基金资助项目(201901D211236,201901D211243)。

摘　　要：晶体材料具有高透明度、低缺陷损耗和不易被水蒸气污染等优点,用其制备的回音壁微腔具有超高的光学品质因子,在超高精度传感、非线性光学、光电子学等领域具有重要的应用前景.基于此,搭建了基于超稳定气浮转动的单点金刚石切削及抛光系统,通过高精度三维位移台控制,可实现多种侧面结构的高精度加工.锥形光纤与棱镜耦合倏逝波测试表明,氟化钙晶体谐振腔负载Q超过10^(9),本征Q_(0)值为3.74×10^(9),相对应的表面粗糙为0.334 nm,棱镜耦合稳定封装后仍可保持Q在10^(8)以上.The crystalline whispering gallery mode resonators have ultra-high optical quality factor(Q),due to the advantages of high transparency,low defect and excellent water resistance.It shows a promising in high-precision sensing,nonlinear optics and optoelectronics.Based on this,we built a single point diamond cutting and polishing system based on a stable air floating rotation.By controlling the single crystal diamond tool movement with a high-precision three-axis stages,high precision machining of various lateral structures are realized.Evanescent wave coupling via the tapered fiber and prism shows that the Q of the calcium fluoride resonator exceeded 10^(9) and the intrinsic Q is 3.74×10^(9),and the corresponding surface roughness is 0.334 nm.The Q value still remains above 10^(8) after the prism coupling stabilization package.

关 键 词：回音壁模式 光学晶体谐振腔 超高Q 棱镜耦合 光学微腔 

分 类 号：O436[机械工程—光学工程]