基于氟化钙光学谐振腔的声传感机理研究  

Research on acoustic sensing mechanism based oncalcium fluoride optical resonator

作　　者：邢恩博 邢彤 戎佳敏 唐军 XING Enbo;XING Tong;RONG Jiamin;TANG Jun(School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051

出　　处：《传感器与微系统》2022年第7期9-12,28,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金青年科学基金资助项目(52005457,62004179);山西省青年科学基金资助项目(201901D211236,201901D211243)。

摘　　要：氟化钙回音壁模式谐振腔的光学品质因子实验上已经突破10^(11),同时能够实现高稳定棱镜耦合集成,因此,在非接触式的超高灵敏度声学传感方面具有重要的应用潜力。然而,对于高杨氏模量氟化钙晶体材料,外界声学扰动的机理尚不明确。基于氟化钙晶体盘型谐振腔结构,对外界声学扰动的影响机理进行研究。当外界声压作用于谐振腔时,从空气密度引起的折射率变化、弹光效应诱导有效折射率改变和谐振腔结构形变三个方面开展了研究。计算结果表明:声压导致的谐振腔结构形变影响最为明显,以实验室器件为参考,达到了1.196×10^(-10)Pa^(-1),对应的谐振峰波长响应为4.63×10^(-7)nm/Pa。谐振腔厚度及支撑结构的优化能够提升一个数量级以上,灵敏度可以较容易突破1 V/Pa。The optical quality factor of the calcium fluoride(CaF_(2))whispering gallery mode resonator has exceeded 10^(11) experimentally.Meanwhile,it can realize the integration of high-stability prism coupling,so it has important application potential in non-contact ultra-high sensitivity acoustic sensing.However,for CaF_(2) crystal materials with high Young’s modulus,the mechanism of external acoustic disturbance is still unclear.The influence of external acoustic disturbance is studied based on the structure of CaF_(2) crystal disk-shaped resonator.When the external acoustic pressure acts on the resonator,the effect of air density,elastic-optic effect and structural deformation of the resonant cavity is studied.The results show that the effect of acoustic pressure on the deformation of the resonant cavity is the most obvious,which reaches 1.196×10^(-10) Pa^(-1),and the corresponding resonant wavelength response is 4.63×10^(-7) nm/Pa.The optimization of resonator thickness and support structure can improve one order of magnitude,and the sensitivity easily breaks through 1 V/Pa.

关 键 词：回音壁模式谐振腔 氟化钙晶体 高灵敏度 声传感机理 弹光效应 结构形变 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O426.3[自动化与计算机技术—控制科学与工程]