基于微纳结构的柔性压力传感器设计与制备  

Flexible pressure sensor design and fabrication based on micro-nano structure

作　　者：侯丽娟 秦会斌[1] 胡炜薇[1] 秦晋 HOU Lijuan;QIN Huibin;HU Weiwei;QIN Jin(School of Electronic Information,Hangzhou Dianzi University,Hangzhou 310018,China)

机构地区：[1]杭州电子科技大学电子信息学院,浙江杭州310018

出　　处：《传感器与微系统》2022年第7期73-76,共4页Transducer and Microsystem Technologies

基　　金：浙江省科技计划资助项目(2017C01027)。

摘　　要：设计了一种柔性压力传感器的制备方法,通过对柔性材料的性能分析,选择导电银浆作为传感器的导电层。为了增强传感器的导电性能,介电层材料采用聚氨酯和炭黑的复合材料。同时,为提升传感器的灵敏度,在介电层中采用微结构设计,利用丝网印刷工艺将柔性材料印刷至柔性基底表面。最后,根据电极阵列点的设计封装得到柔性压力传感器。通过测试数据分析得出,相同的压力作用下,具有微结构的传感器发生的形变量更大,灵敏度更高,稳定性能良好。该设计的压力传感器具有成本低、制备工艺简单等特点,并且灵敏度性能有所提升,在智能穿戴和医疗检测等领域有广阔的应用前景。A preparation method of flexible pressure sensor is designed,through the performance analysis on flexible material,conductive silver paste is selected as the conductive layer of the sensor.In order to improve the conductive performance of the sensor,the dielectric layer material is made of polyurethane and carbon black composite material.At the same time,in order to improve the sensitivity of the sensor,a micro-structure design is adopted in the dielectric layer,and the flexible material is printed on the surface of the flexible substrate by screen printing process.Finally,the flexible pressure sensor is encapsulated according to the design of electrode array points.Through the analysis of test data,it is concluded that under the same pressure,the shape variable of the sensor with microstructure is larger and the sensitivity is higher,and the stability is good.The designed pressure sensor has the characteristics of low cost,simple preparation process,and improved sensitivity,which has a broad application prospect in the fields of smart wearable and medical detection.

关 键 词：柔性压力传感器 微结构 灵敏度 导电层 介电层 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]