宽温区高精度铂薄膜热敏电阻器研制  

Development of high precision wide temperature range platinum thin-film thermistor

作　　者：王大兴 姜晓龙 杨永超 皮倩倩 刘玺 WANG Daxing;JIANG Xiaolong;YANG Yongchao;PI Qianqian;LIU Xi(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028

出　　处：《传感器与微系统》2022年第7期81-84,共4页Transducer and Microsystem Technologies

摘　　要：针对现有产品测温范围窄、允差等级低的问题,设计一种高精度宽温区铂薄膜热敏电阻器,开展高稳定铂膜制备和高精度阻值修调技术研究,提升温度系数和阻值精度参数指标,优选高温防护玻璃包封材料,拓宽产品测温范围。测试结果表明:产品测温范围覆盖-80~600℃,允差等级在-55~300℃温区内符合IEC60751规定1/3B级,其余温区符合IEC60751规定B级要求,温度系数为(3851±4)×10^(-6)/℃,性能指标优于国际标准,可广泛用于航空、航天领域高可靠温度测量。In view of the problems of narrow temperature measurement range and low grade of tolerance existing products,a high-precision wide-temperature range platinum film thermistor is designed.Research on preparation of high-stable platinum film and high-precision resistance value adjustment technology is carried out to improve the temperature coefficient and the resistance value precision parameter index,the high temperature protective glass encapsulation material is preferred,and the temperature measurement range of the product is broadened.The test results show that the temperature measurement range of the product covers-80℃to 600℃,the grade of tolerance within the range of-55~300℃,which meets the requirements of IEC 60751 class 1/3B,and the rest of the temperature zones meet the requirements of IEC 60751 class B.The temperature coefficient is(3851±4)×10^(-6)/℃,and the performance index is prior to the international standard.It can be widely used for highly reliable temperature measurement in aviation and aerospace fields.

关 键 词：热敏电阻器 宽温区 允差 温度系数 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]