3ω法表征热导率研究进展  

Research Progress on Thermal Conductivity Characterization by 3ωMethod

作　　者：郝斌 张建新[1,2,3] Hao Bin;Zhang Jianxin(School of Electric and Information Engineering,Tiangong University,Tianjin 300387,China;Tianjin Key Laboratory of Optoelectronic Detection Technology and Systems,Tiangong University,Tianjin 300387,China;Engineering Research Center of High Power Semiconductor Lighting Application System of Ministry of Education,Tiangong University,Tianjin 300387,China)

机构地区：[1]天津工业大学电子与信息工程学院,天津300387 [2]天津工业大学天津市光电检测技术与系统重点实验室,天津300387 [3]天津工业大学大功率半导体照明应用系统教育部工程研究中心,天津300387

出　　处：《半导体技术》2022年第6期429-436,454,共9页Semiconductor Technology

基　　金：天津市科技计划项目(20YDTPJC01220);天津市自然科学基金一般项目(18JCYBJC85400);天津市教委科研计划重点项目(2018ZD15)。

摘　　要：3ω法作为一种表征固体薄膜、液体、气体等材料热导率的通用性技术,由于其测量成本低、采集速度快和样品制备工艺相对简单等独特的优势,在功率器件、绿色能源、生物医学等领域具有良好的应用前景。综述了近年来3ω法表征热导率的研究进展。首先介绍了3ω法表征热导率的基本原理;然后归纳总结了3ω法在不同微纳材料尺度下表征热导率的进展和成果,分类说明了3ω法在生物医学领域和第三代宽禁带功率半导体材料领域的最新应用;最后对3ω法表征热导率的研究成果进行总结,指出了目前存在的问题,并进一步展望了未来的发展方向。As a universal technology to characterize the thermal conductivity of solid films,liquids,gases and other materials,3ωmethod has good application prospects in power devices,green energy,biomedicine and other fields due to its unique advantages such as low test cost,fast acquisition speed and relatively simple sample preparation process.The research progress of 3ωmethod in characterizing thermal conductivity in recent years is summarized.Firstly,the basic principle of 3ωmethod in characterizing thermal conductivity is introduced.Then,the progress and achievements of 3ωmethod in characterizing thermal conductivity at different micro/nano-material scales are summarized,and the latest applications of 3ωmethod in biomedical field and the third generation wide band gap power semiconductor materials are classified and illustrated.Finally,the research results of thermal conductivity characterized by 3ωmethod are summarized,the existing problems are pointed out,and the future development directions are further prospected.

关 键 词：3ω法 热导率 功率器件 生物医学 微纳材料 

分 类 号：TN304.07[电子电信—物理电子学]