聚焦超声换能器的仿真与性能分析  

Simulation and Performance Analysis of Focused Ultrasonic Transducer

作　　者：遆金铭 余卿 樊青青 李俊红[1] TI Jinming;YU Qing;FAN Qingqing;LI Junhong(State Key Laboratory of Acoustics, Institute of Acoustics,Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Academy of Sciences, Beijing 100049, China)

机构地区：[1]中国科学院声学研究所声场声信息国家重点实验室,北京100190 [2]中国科学院大学,北京100049

出　　处：《压电与声光》2022年第3期418-421,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11874388,12174420);中国科学院声学研究所自主部署“目标导向”类项目(MBDX202112)。

摘　　要：高频声透镜聚焦超声换能器在电子器件评估与检测、材料微观机械性能表征、生物医学成像、细胞操控等方面具有重要的应用。结构参数是影响其性能的主要因素之一。该文通过有限元法对基于声透镜结构的高频聚焦超声换能器进行仿真模拟,分析了声透镜的开孔角度对该类换能器聚焦区域声压模式、横向分辨率、-6 dB景深等关键性能参数的影响。仿真结果表明,换能器的焦距和横向分辨率与理论计算结果接近。随着声透镜开孔角度的增大,换能器的横向分辨力随之提高,焦点处声压级逐渐增大,-6 dB景深逐渐下降。这为声透镜聚焦超声换能器的优化设计提供了一定的技术基础。The high frequency acoustic lens focused ultrasonic transducer has important applications in electronic device evaluation and detection,material micro-mechanical properties characterization,biomedical imaging,cell manipulation,etc.The structural parameters are one of the main factors affecting its performance.In this paper,the high-frequency focused ultrasonic transducer based on acoustic lens structure is simulated by finite element method,and the influence of the opening angle of acoustic lens on the key performance parameters such as acoustic pressure pattern,lateral resolution and-6 dB depth of field in the focused region of this type of transducer is analyzed.The simulation results show that the focal length and lateral resolving power of the transducer are close to the theoretical calculation results.With the increase of the opening angle of the acoustic lens,the lateral resolving power of the transducer will be improved,the-6 dB depth of field will decrease,and the sound pressure level at the focus will increase.This paper provides a certain technical basis for the optimal design of acoustic lens focused ultrasonic transducer.

关 键 词：有限元法 聚焦超声换能器 灵敏度 景深 声透镜 压电 

分 类 号：TN384[电子电信—物理电子学] TB565.1[交通运输工程—水声工程]