高速硅基单端推挽驱动狭缝脊波导调制器  

High Speed Single-drive Push-pull Silicon Modulator Based on Slot Rib Waveguide

作　　者：蔡龙飞 胡国华[1] 恽斌峰[1] CAI Longfei;HU Guohua;YUN Binfeng(Advanced Photonics Center,Southeast University,Nanjing 210096,CHN)

机构地区：[1]东南大学先进光子学中心,南京210096

出　　处：《半导体光电》2022年第2期248-253,共6页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2018YFB2201800);国家自然科学基金项目(62171118)。

摘　　要：针对硅基单端推挽驱动调制器的脊波导pn结部分结电容较大,限制了调制器带宽进一步提高的问题,提出了一种狭缝脊波导pn结结构。通过将脊波导pn结蚀刻一定尺寸的狭缝,降低了pn结电容,实现了带宽的提升。对两种pn结进行了仿真对比,结果表明,在相同电极结构与掺杂条件下,狭缝脊波导调制器比脊波导调制器的电光带宽提升了约8.3 GHz。基于优化的单端推挽驱动狭缝脊波导调制器,仿真实现了90 Gbit/s的OOK信号调制,眼图消光比为14.69 dB。According to the large junction capacitance of the rib waveguide pn junction of the single-drive push-pull silicon modulator,which limits the further improvement of the modulator’s bandwidth,a silicon modulator with slot rib waveguide pn junction structure is proposed.By etching the rib waveguide pn junction with a certain size of slot,the capacitance of the pn junction is reduced and the modulation bandwidth is increased.The two pn junctions are simulated and compared,and the results show that with the same electrode structure and doping conditions,the electro-optical bandwidth of the slot rib waveguide modulator is increased by about 8.3 GHz compared with the rib waveguide modulator.Based on the optimized single-drive push-pull slot rib waveguide modulator,the 90 Gbit/s OOK signal modulation is simulated,and 14.69 dB extinction ratio of eye-diagram is obtained.

关 键 词：硅光子 电光调制器 行波电极 马赫-曾德尔干涉仪 PN结 

分 类 号：TN25[电子电信—物理电子学]