数字微镜器件光刻和电沉积结合制备金微阵列电极的结构优化与性能检测  

Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition

作　　者：杨东方 陆子凤 刘华 单桂晔 YANG Dong-fang;LU Zi-feng;LIU Hua;SHAN Gui-ye(Center for Advanced Optoelectronic Functional Materials Research,and Key Laboratory for UV Emitting Materials and Technology of Ministry of Education,National Demonstration Center for Experimental Physics Education,Northeast Normal University,Changchun 130024,China)

机构地区：[1]先进光电子功能材料研究中心,紫外光发射材料与技术教育部重点实验室,国家级物理实验教学示范中心,东北师范大学,吉林长春130024

出　　处：《中国光学》2022年第3期592-607,共16页Chinese Optics

基　　金：国家自然科学基金(No.61875036);吉林省科技发展计划项目(No.20190302049GX)。

摘　　要：为提高微阵列电极(Microarray electrodes,MAE)的检测效率,降低生产成本,提出了一种将数字微镜器件(DMD)无掩模投影光刻与电化学沉积相结合的技术。首先,利用光刻系统压电平台(PZS)的高分辨率运动和DMD生成图案的灵活性等优点,制备了用户可自定义的微结构阵列,接着,通过电化学沉积获得Au导电层,实现了均匀的Au微阵列电极(Au/MAE)的制备。然后通过循环伏安法,比较了不同结构的Au/MAE的电化学性能,获得了优化的结构参数。最后,研究了优化后的Au/MAE对于不同浓度和pH值的葡萄糖的电流响应,并通过计时电流法对Au/MAE检测葡萄糖的抗干扰能力进行了测试。电化学分析表明,这种简单的Au/MAE对葡萄糖的电化学检测具有显著的安培响应和较强的抗干扰能力,其灵敏度为101μA·cm^(−2)·mM^(−1)。这种微阵列电极的制备方法,具有分辨率高、一致性高、工艺简单、成本低的优点,为生物传感阵列的制造提供了切实可行的操作方案。In order to improve the detection efficiency of Micro Array Electrodes(MAE)and reduce the production cost,a technology combining Digital Micromirror Device(DMD)maskless projection lithography with electrochemical deposition was proposed.Firstly,a user-defined micro array was fabricated by using the advantages of lithography system such as high-resolution PZS motion and imaging flexibility of DMD.And a uniform Au microarray electrode(Au/MAE)was fabricated after obtaining an Au conducting layer by electrodeposition.Then,the electrochemical properties of Au/MAE with different structures were compared by cyclic voltammetry,and the optimized structural parameters were obtained.Finally,the current response of optimized Au/MAE to the glucose with different concentrations and pH values was studied,and the anti-interference of Au/MAE in glucose detection was tested by chronoamperometry.The electrochemical analysis shows that the simple Au/MAE has a significant amperometric response,a strong anti-interference ability and a sensitivity of 101μA·cm^(−2)·mM^(−1) in the electrochemical detection of glucose.This method has the advantages of high resolution,high consistency,simple process and low cost,which provides a feasible operation scheme for the fabrication of biosensor array.

关 键 词：DMD光刻 电化学沉积 微结构阵列 电极 

分 类 号：O439[机械工程—光学工程]