低光学衍射随机六元环金属网络导电膜  

Low optical diffraction random hexagonal structure metallic network conductive films

作　　者：李子杨 杨霄[1] 刘华松[1] 姜玉刚[1] 白金林 李士达 杨仕琪 苏建忠[1] Li Zi-Yang;Yang Xiao;Liu Hua-Song;Jiang Yu-Gang;Bai Jin-Lin;Li Shi-Da;Yang Shi-Qi;Su Jian-Zhong(Tianjin Key Laboratory of Optical Thin Film,Tianjin Jinhang Technical Physics Institute,Tianjin 300308,China)

机构地区：[1]天津津航技术物理研究所,天津市薄膜光学重点实验室,天津300308

出　　处：《物理学报》2022年第13期169-175,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:61975150,61775167,61705165);天津市自然科学基金(批准号:19JCZDJC38400,18JCZDJC37900);国家拔尖青年人才支持计划;天津市人才发展专项支持计划高层次创新团队;天津市创新人才推进计划重点领域创新团队。

摘　　要：传统金属网栅多为二维方格结构,光学透射率损耗较大,高级次衍射杂散光严重干扰探测系统成像质量.本文设计了一种具有随机六元环表面结构的金属网络导电薄膜,该结构相较于传统二维方格结构金属网栅具有更高的光学透射率;由于在结构中引入了随机变量,也可以实现高级次衍射杂散光的抑制.随后在ZnS光学窗口上完成了线宽为4μm、周期为100μm的随机六元环结构金属网络导电膜的制备.测试结果表明,样品表面图案完整、金属线清晰可见、线宽均匀、无断线情况发生.ZnS光学窗口在长波红外波段透射率损失10.5%,在可见光波段透射率仅损失6.8%,同时可以显著均化高级次衍射杂散光分布.电磁屏蔽数值仿真结果显示,该网络导电膜在0.2—20 GHz电磁波谱段内平均电磁屏蔽效能为37.9 dB,最低屏蔽效能29.6 dB,比传统方格结构网栅高3.2 dB.本文设计并制备的随机六元环结构金属网络导电膜具有优异的光学性能与电磁屏蔽效能,对于提升图形化光学窗口的综合性能具有重大意义.Traditional metallic meshes are a two-dimensional square structure with high optical transmittance loss,and the diffraction of light seriously interferes with the imaging quality of the detection system.In this work a metallic network conductive film with a random hexagonal surface structure is designed.This structure has a higher optical transmittance than conventional square metallic meshes.As a result of the random variables in the structure,it can also suppress the stray light of high-order diffraction.Then we prepare a metallic network conductive film on a ZnS optical window with a line width of 4μm and a period of 100μm.The metal lines of the sample are clear,the line width is uniform,and there is no dotted line.The transmission loss of the ZnS optical window is 10.5%in the long-wave infrared band(LWIR)band but only 6.8%in the visible band,which has low energy loss.At the same time,it can achieve uniform optical diffraction,thus reducing the imaging interference to the photoelectric detection system.The numerical simulation results show that the average EMI shielding efficiency is 37.9db,which is in an electromagnetic spectrum range from 0.2 GHz to 20 GHz,and its minimum shielding efficiency is 29.6 dB,which is 3.2 dB higher than the traditional square mesh’s.The random hexagonal structure metallic network conductive films designed and prepared in this paper have excellent optical properties and EMI shielding efficiencies,which is of great significance in improving the comprehensive performance of the graphical optical window.

关 键 词：光学窗口 金属网络导电膜 电磁屏蔽 高级次衍射 

分 类 号：TN03[电子电信—物理电子学] TB383.2[一般工业技术—材料科学与工程]