真空预载小孔节流静压气浮轴承静态特性分析  

Static Characteristic Analysis of Vacuum Preloaded Orifice Throttling Aerostatic Floating Bearing

作　　者：陈作炳[1] 洪俊辉 梅文辉 吴志豪 童程光 CHEN Zuobing;HONG Junhui;MEI Wenhui;WU Zhihao;TONG Chengguang(School of Mechanical and Electrical Engineering,Wuhan University of Technology,Wuhan 430070,China;Zhongshan Aiscent Technologies,Co.,Ltd.,Zhongshan 528437,China)

机构地区：[1]武汉理工大学机电工程学院,湖北武汉430070 [2]中山新诺科技股份有限公司,广东中山528437

出　　处：《工业技术创新》2022年第3期51-57,共7页Industrial Technology Innovation

摘　　要：气浮轴承是光刻机等高精度设备的关键部件,其静态特性直接决定设备精度。以真空预载小孔节流静压气浮轴承为研究对象,探究供气压力、真空度、真空腔面积比以及节流孔直径等因素对轴承静态特性的影响。研究发现气膜厚度与轴承的静态特性呈现4个方面相关性:1)当气膜厚度一定时,供气压力越大,轴承承载能力和刚度越大,最大刚度对应的气膜厚度为7~9μm;2)真空度越大,轴承承载能力越小,但真空度对轴承刚度影响较小;3)真空腔的加入使轴承承载能力下降,但为轴承提供了双向刚度,气膜厚度和真空腔面积比与轴承刚度呈负相关;4)节流孔直径越大,轴承承载能力越大,气膜厚度较小时,节流孔直径与轴承刚度呈负相关,最大刚度对应的气膜厚度为6~12μm。当气膜厚度超过20μm时,轴承刚度在上述分析情况下均趋于零。Aerostatic floating bearing is the key component of high precision equipment such as photoetching machine,and its static characteristics directly determine the precision of the equipment.Taking the vacuum preloaded orifice throttling aerostatic floating bearing as the research object,the influence of air supply pressure,vacuum degree,area ratio of vacuum chamber and orifice diameter on the static characteristics of the bearing was explored.Findings:there are 4 correlations between the film thickness and the static characteristics of the bearing.1)When the film thickness is constant,the bearing capacity and the bearing stiffness increase with the increase of air supply pressure,and the film thickness corresponding to the maximum stiffness is 7~9μm;2)the greater the vacuum degree,the smaller the bearing capacity,but the vacuum degree has little influence on the bearing stiffness;3)the introduction of vacuum chamber reduces the bearing capacity,but provides bidirectional stiffness for the bearing,the film thickness and the area ratio of the vacuum chamber are negatively correlated with the bearing stiffness;4)the larger the orifice diameter,the greater the bearing capacity and the smaller the film thickness,the orifice diameter is negatively correlated with the bearing stiffness,and the film thickness corresponding to the maximum stiffness is 6~12μm.When the film thickness exceeds 20μm,the bearing stiffness in all analyzed cases tends to zero.

关 键 词：气浮轴承 真空预载 承载能力 静态特性 气膜厚度 真空腔面积比 

分 类 号：TH133.3[机械工程—机械制造及自动化]