基于有限元法的气体放电模拟综述  

A review of gas discharge simulation based on finite element method

作　　者：车瑞 孙明[2] CHE Rui;SUN Ming(Logistics Engineering College,Shanghai Maritime University,Shanghai 201306;Institute of Electrostatics,Shanghai Maritime University,Shanghai 201306)

机构地区：[1]上海海事大学物流工程学院,上海201306 [2]上海海事大学静电研究所,上海201306

出　　处：《电气技术》2022年第7期18-25,80,共9页Electrical Engineering

摘　　要：本文综述了利用多物理场耦合分析软件COMSOL模拟平台对气体放电过程的研究,包括对不同电极结构建立一维、二维和三维数值模型,通过有限元方法对多个耦合起来的物理方程组进行离散求解,进而实现对不同气体放电的仿真模拟。实验法作为辅助COMSOL数值模拟的一种重要手段,用于验证模拟结果,主要有示波器检测法和发射光谱法。得出在不同的放电形式下,介电常数、介质厚度、放电间隙、气速、气体成分和脉冲参数对电场强度、电子密度、粒子密度和电子温度等的影响。最后,对基于有限元法的气体放电研究存在的不足进行讨论。Research on gas discharge processes using multi-physical coupling analysis software COMSOL is reviewed in this paper.The establishments of one-dimensional,two-dimensional and three-dimensional numerical models of different electrode structures,finding the solution of the coupled physical equations and simulation of different gas discharge processes by a finite element method are included.As an important means to assist COMSOL numerical simulation,experimental method is used to verify the simulation results,mainly including oscilloscope detection method and emission spectrum method.The research results show that parameters,such as electric field strength,electron density,particle density,and electron temperature,are affected by dielectric constants,dielectric thickness,discharge gap,aerial speed,gas componentsand pulse parameters in different discharge forms.Finally,the insufficiency in the research of gas discharge based on finite element method is discussed.

关 键 词：气体放电 电极结构 有限元方法 仿真 

分 类 号：O461[理学—电子物理学]