TA1双极板磁控溅射不同过渡层的碳涂层改性研究  

Modification of Carbon Coatings with Different Transition Layers on TA1 Bipolar Plate by Magnetron Sputtering

作　　者：蔡锦钊 宓保森 陈卓[1,2] 秦子威 汪宏斌 CAI Jin-zhao;MI Bao-sen;CHEN Zhuo;QIN Zi-wei;WANG Hong-bin(School of Materials Science and Engineering,Shanghai University,Shanghai 200444,China;Panxing Technology(Zhejiang)Co.,Ltd.,Zhejiang Jinhua 321000,China;Shanghai Metal Parts Green Remanufacturing Engineering Technology Research Center,Shanghai 200444,China)

机构地区：[1]上海大学材料科学与工程学院,上海200444 [2]畔星科技(浙江)有限公司,浙江金华321000 [3]上海金属零部件绿色再制造工程技术研究中心,上海200444

出　　处：《表面技术》2022年第7期218-224,共7页Surface Technology

摘　　要：目的改善TA1双极板的耐腐蚀性和导电性能,提高转换效率和使用寿命。方法采用多梯度复合涂层思路,利用闭合场非平衡磁控溅射技术,在TA1基体表面制备了Ti/CrN/a-C、Ti/TiN/a-C和Ti/TiCrN/a-C等3种不同过渡层的碳涂层。分别通过扫描电镜、拉曼光谱、光电子能谱、电化学极化测试和表面接触电阻测试分析了碳涂层的表面形貌、成键杂化形式、杂化含量比例、耐蚀性能和导电性能。结果3种不同过渡层的碳涂层与基体结合良好,都呈无定形碳分布,但形貌结构相差较大。其中Ti/TiN/a-C涂层的A_(D)/A_(G)值最大,达到4.26,且碳原子中C-sp^(2)杂化含量比例最高,达到79.32%。而Ti/TiCrN/a-C涂层的FWHM(G)最大,达到137.29,且碳原子中C-sp^(3)杂化含量比例最高,达到26.03%。3种不同过渡层的碳涂层与TA1基体相比,耐腐蚀性明显提高,其中Ti/TiCrN/a-C涂层的耐腐性能最优异,动电位和恒电位腐蚀电流密度分别为7.81×10^(–7)、8.14×10^(–7) A/cm^(2),小于TA1基体的2.76×10^(–6)、3.21×10^(–6) A/cm^(2)。此外,在1.4 MPa的压紧力下,不同过渡层(Ti/CrN/a-C、Ti/TiN/a-C、Ti/TiCrN/a-C)的碳涂层的表面接触电阻分别为12.3、5.4、6.5 mΩ·cm^(2),小于TA1基体的93.5 mΩ·cm^(2),大约降低了1个数量级。结论通过不同元素掺杂和控制工艺参数靶流,获得了成分梯度变化的不同氮化物过渡层,影响最外面工作层纯碳的沉积效果,改变其微观形貌与结构,从而影响导电性和耐腐蚀性能。In order to improve the corrosion resistance and electrical conductivity of TA1 bipolar plate,enhance the conversion efficiency and service life.The idea of multi-gradient composite coating was adopted,the carbon coatings with three different transition layers of Ti/CrN/a-C,Ti/TiN/a-C and Ti/TiCrN/a-C are prepared on the surface of TA1 substrate by using closed field unbalanced magnetron sputtering technology.The surface morphology,bonding hybridization form,hybrid content ratio,corrosion resistance and electrical conductivity of the carbon coating are respectively analyzed by scanning electron microscopy,raman spectroscopy,photoelectron spectroscopy,electrochemical polarization and surface contact resistance test.The result shows the carbon coatings of the three different transition layers are well bonded to the matrix,and all have amorphous carbon distribution,but the morphology and structure are different.The A_(D)/A_(G) value of Ti/TiN/a-C coating is the highest,reaching 4.26,and the proportion of C-sp2 hybrid in carbon atom is the highest,reaching 79.32%.The FWHM(G)of Ti/TiCrN/a-C coating is the highest,reaching 137.29,and the proportion of C-sp^(3) hybrid content in carbon atom is the highest,reaching 26.03%.Compared with TA1 matrix,the corrosion resistance of carbon coatings with three different transition layers is significantly improved.The corrosion resistance of Ti/TiCrN/a-C coating is the best,The potentiodynamic and potentiostatic corrosion current densities are 7.81×10^(–7) A/cm^(2) and 8.14×10^(–7) A/cm^(2),respectively.It is smaller than 2.76×10^(–6) A/cm^(2) and 3.21×10^(–6) A/cm^(2) of TA1 matrix,respectively.In addition,the surface contact resistances of carbon coatings with three different transition layers are 12.3 mΩ·cm^(2),5.4 mΩ·cm^(2) and 6.5 mΩ·cm^(2) under 1.4 MPa compression force,respectively.which is less than 93.5 mΩ·cm^(2) of TA1 matrix,it's about an order of magnitude lower through calculation.In conclusion,By doping different elements and controlling the t

关 键 词：TA1 过渡层 碳涂层 耐腐蚀性 表面接触电阻 

分 类 号：TG174[金属学及工艺—金属表面处理]