扫描电子束能量峰值对表面温度场的影响规律  

The Influence of the Peak Energy of Scanning Electron Beam on the Surface Temperature Field

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作  者:李新凯[1] 王荣[1] 胡露瑶 任旭隆 王喜社[1] LI Xin-kai;WANG Rong;HU Lu-yao;REN Xu-long;WANG Xi-she(Guilin University of Electronic Technology,Guangxi Guilin 541004,China;Guilin Tourism University,Guangxi Guilin 541004,China)

机构地区:[1]桂林电子科技大学,广西桂林541004 [2]桂林旅游学院,广西桂林541004

出  处:《表面技术》2022年第7期306-313,共8页Surface Technology

基  金:广西自然科学基金项目(2020GXNSFBA297079,2022GXNSFAA035585);国家自然科学基金资助项目(52165057,51665009);桂林市重点研发计划(20211B032068)。

摘  要:目的 明确扫描电子束环状下束方式下能量分布数学模型以及能量峰值系数对45钢表面温度场的影响规律。方法 基于高斯热源模型,引入能量峰值位置参数,演算扫描电子束环状下束方式下能量分布的数学模型,利用COMSOL软件,模拟扫描带热循环曲线与温度场。结果 针对环状下束方式下电子束热源模型进行修订,电子束能量分布沿中心线对称分布,表层能量分布与偏转角度和能量峰值参数相关,能量峰值参数在0~1内,数值越大c点第一、二能量峰值及其差值越大,扫描带纵向点温差越小,热循环曲线间距越小;电子束下束与收束阶段,束斑温度变化较大,而扫描中期温度较为稳定,能量峰值参数越大,45钢表层高温区域半径越大,最高温度也有所增加;45钢经不同能量峰值系数作用后,扫描带与亚高温带区域的宽度有所不同。结论 能量峰值参数对环状电子束能量分布有较大影响,ξ=1时束斑在表层能量梯度最小,有利于大面域电子束表面改性下的能量均匀分布。The mathematical model of energy distribution in the circular downward beam mode of scanning electron beams is clearly defined.Obtain the influence law of energy crest factor on the surface temperature field of 45 steel.Based on the Gaussian heat source model,the energy peak position parameter is introduced to calculate the mathematical model of the energy distribution in the scanning electron beam downward beam mode.The COMSOL software was used to simulate the thermal cycle curve and temperature field of the scanning zone.Revised the electron beam heat source model in the ring-shaped downward beam mode.The results show that the electron beam energy distribution was symmetrically distributed along the center line.The surface energy distribution was related to the deflection angle and the energy peak parameter.When the energy peak parameter was within 0 to 1,the value becomes higher and higher,the larger the first and second energy peaks at point c,the larger the difference between the two.When the parameter was 0,the maximum temperature difference at the sampling point was 1065 K.The smaller the temperature difference between the longitudinal points of the scanning belt,the smaller the distance between the thermal cycle curves.At the same time,it can be seen from the heat source model that the energy peak has a greater impact on the beam diameter of the ring electron beam,and the maximum ring diameter can be up to 8 mm under the selected basic parameters.When the parameter was 1,the temperature curves of the sampling points are the closest,which indicates that the surface heat distribution under this parameter was uniform.It can be seen from the temperature field simulation diagram that the beam spot temperature varies greatly during the down and converging phases of the electron beam,while the temperature in the middle of the scan was relatively stable,and the temperature difference was basically stable within 20 K.The larger the energy peak parameter,the larger the radius of the high temperature area on the sur

关 键 词:扫描电子束 能量 温度场 热源 表面改性 

分 类 号:V261.6[航空宇航科学与技术—航空宇航制造工程]

 

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