短中波红外长线阵拼接集成滤光片技术研究  

Research on splicing integrated filter technology of short/medium infrared long line array

作　　者：王润福 王多书[2] 范栋 李晨[3] 王济洲[3] 董茂进[3] Wang Runfu;Wang Duoshu;Fan Dong;Li Chen;Wang Jizhou;Dong Maojin(Science and Technology on Material Performance Evaluating in Space Environment Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所空间环境材料行为及评价技术重点实验室,甘肃兰州730000 [2]兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州730000 [3]兰州空间技术物理研究所,甘肃兰州730000

出　　处：《红外与激光工程》2022年第6期161-168,共8页Infrared and Laser Engineering

摘　　要：空间光谱成像技术的发展使得探测器阵列与分光元件的集成成为一种趋势,长线阵拼接集成滤光片是空间多光谱成像仪实现焦平面集成分光的关键器件,在我国空间多光谱成像光学系统中需求明显。设计了4通道短中波红外长线阵拼接集成滤光片,采用离子束辅助轰击的电子枪蒸发方法制备了各通道窄带滤光片,利用专门研制的工装探索了拼接工艺,研制出了短中波红外长线阵拼接集成滤光片。测试结果表明:集成滤光片各通道平均透射率达到90%,最小带宽为230 nm (中心波长为4.95μm),光谱性能与设计结果吻合,满足性能指标要求。最小拼缝宽度仅为10μm,拼缝不平行误差为1μm,集成滤光片设计结构和拼接强度能够耐受抗振性试验。该集成滤光片已经在空间光学遥感仪器上成功应用。The development of spatial spectral imaging technology makes the integration of detector array and light splitting elements become a trend. The long line array splice integrated filter(LLASIF) is the key device of spatial multispectral imager to realize concentrated light splitting at focal plane, and it has obvious demand in the spatial multispectral imaging system in China. In this paper, a 4-channel short/medim infrared LLASIF was designed. The narrow band filter of each channel was prepared by electron gun evaporation method assisted by ion beam. The splicing process was explored by using specially developed tools and the LLASIF was developed.The test results show that the average transmittance of each narrow band filter reaches 90%, the minimum bandwidth is 230 nm(central wavelength is 4.95 μm), and the spectral performance is consistent with the design results and meets the performance requirements. The minimum seam width is only 10 μm, the seam parallelism error is 1 μm. The integrated filter structure and splicing strength can withstand the vibration resistance test. The integrated filter has been successfully applied in space optical remote sensing instrument.

关 键 词：长线阵拼接集成滤光片 短中波红外 空间光谱成像 光学薄膜 

分 类 号：O439[机械工程—光学工程]