大口径透镜混合柔性支撑结构优化设计  

Optimization design of large-aperture lens mixed flexible support structure

作　　者：王晓迪 曹玉岩[1] 王富国[1] 初宏亮 李延伟 Wang Xiaodi;Cao Yuyan;Wang Fuguo;Chu Hongliang;Li Yanwei(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;Ji Hua Laboratory,Foshan 528200,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049 [3]季华实验室,广东佛山528200

出　　处：《红外与激光工程》2022年第6期270-280,共11页Infrared and Laser Engineering

基　　金：国家自然科学基金(11803035,U2031126)。

摘　　要：针对大口径透镜,提出了一种新型混合柔性支撑结构,能够使透镜同时满足面形精度及位置精度要求。首先利用卡氏第二定理对各柔性铰链进行分析,建立支撑组件整体柔度模型。然后以柔性支撑组件的总变形能为目标函数,以位置精度及实际使用空间要求为约束,建立结构优化设计模型。之后确定径向柔性支撑结构对组件整体柔度的敏感度最大并对其刚度进行验证。最后对优化后的透镜组件整体结构进行有限元分析,同时利用曲面拟合方法计算镜面面形精度。仿真结果表明,在该新型混合柔性支撑结构的作用下,透镜在各要求工况下的面形精度均优于λ/20 (λ=632.8 nm)。所设计的新型混合柔性支撑结构及其理论分析过程可为高精度大口径透镜的支撑技术提供参考。A novel mixed flexible support structure was proposed to satisfy the requirements of surface and position accuracy of a large-aperture lens. First, Castigliano’s second theorem was used to analyze the various flexible hinges and the whole flexibility model of the support component was established. Then, the objective function of the total deformation energy of the flexible support assembly was used to establish the constraint equation based on the position accuracy and the actual space requirements, and a structural optimization design model was established. It was determined that the radially flexible support structure was the most sensitive to the flexibility of the flexible support assembly, and its stiffness was verified. Finally, the finite element analysis of the optimized whole structure of the lens assembly was carried out, and the surface accuracy was obtained by using the geometric fitting method. The simulation results show that the surface shape accuracy of the new hybrid flexible support structure is better than λ/20(λ=632.8 nm) under various conditions. The novel mixed flexible support structure and its theoretical analysis process can provide a reference for the supporting technology of high precision large-aperture lens.

关 键 词：大口径透镜 柔性支撑结构 有限元分析 卡氏第二定理 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]