碳源入射角对超薄四面体非晶碳膜结构和性能的影响  

Effect of Carbon Source Incident Angle on Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films

作　　者：党坤 王华[2] 陈维铅 李玉宏[2] 许世鹏[1,2] DANG Kun;WANG Hua;CHEN Weiqian;LI Yuhong;XU Shipeng(State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals,Lanzhou University of Technology,Lanzhou 730050,China;Key Laboratory of Solar Power System Engineering,Gansu Province,Jiuquan Vocational and Technical College,Jiuquan 735000,Gansu,China)

机构地区：[1]有色金属先进加工与再利用国家重点实验室,兰州理工大学,兰州730050 [2]甘肃省太阳能发电系统工程重点实验室,酒泉职业技术学院,甘肃酒泉735000

出　　处：《硅酸盐学报》2022年第5期1385-1390,共6页Journal of The Chinese Ceramic Society

基　　金：甘肃省高等学校科研项目(2020A-286);酒泉市科技支撑计划项目。

摘　　要：利用45°双弯曲磁过滤阴极真空电弧技术制备超薄四面体非晶碳膜,研究碳源入射角变化对超薄四面体非晶碳膜润湿性、表面能、粗糙度、表面形貌、摩擦系数和微观结构的影响以及它们之间的构效关系。结果表明:碳源入射角从0°增加到60°,薄膜与水的接触角由77.6°小幅增加到了82.4°,与甘油的接触角由64.7°小幅增加到71.2°,表现出亲水性。薄膜总的表面能由33.9 mJ/m^(2)降低到28.0 mJ/m^(2),薄膜接触角的小幅增大归因于材料表面能的降低和表面粗糙度的增加。同时薄膜平均摩擦系数由0.140增加到0.217。碳的近边结构吸收谱表明,随着碳源入射角从0°增加到60°,薄膜sp;含量没有发生明显变化。The tetrahedral amorphous carbon(ta-C)films were fabricated by 45°double-bent filtered cathodic vacuum arc technique,and the wettability,surface energy,roughness,surface topography,friction coefficient and microstructure evolution of ultrathin ta-C film as functions of incident angles of carbon ions were investigated.The results reveal that as the incident angle of carbon ions increases from 0°to 60°,the water contact angle of films slightly increases from 77.6°to 82.4°and the glycerin contact angle of films slightly increases from 64.7°to 71.2°,indicating that all the films are hydrophilic.The total surface energy decreases from 33.9 mJ/m^(2)to 28.0 mJ/m^(2).The slight increase of observed contact angle is attributed to the decrease of surface energy and increase of surface roughness.Also,the average friction coefficient increases from 0.140 to 0.217.According to the near edge X-ray absorption fine structure data,little change for the hybridized sp~3 bond content in the deposited ta-C films appears,regardless of the change of incident angle in a range of 0°–60°.

关 键 词：四面体非晶碳膜 碳源入射角 微观结构 润湿性 表面形貌 

分 类 号：O436[机械工程—光学工程]