基于可视化的真空镀膜装备专利竞争技术分析  

Data Visual Analytics Towards Patent Competition Technology of Vacuum Coating Equipment

作　　者：叶俊文 黎子辉 高峰 李晓刚 王鸿志 YE Junwen;LI Zihui;GAO Feng;LI Xiaogang;WANG Hongzhi(Zhongshan Institute of Standardization,Zhongshan 528403,China;South China University of Technology,Guangzhou 510641,China;Zhongshan Kaixuan Vacuum Science&Technology Co.Ltd.,Zhongshan 528478,China)

机构地区：[1]广东省中山市质量技术监督标准与编码所,中山528403 [2]华南理工大学,广州510641 [3]中山凯旋真空科技股份有限公司,中山528478

出　　处：《真空科学与技术学报》2022年第6期422-429,共8页Chinese Journal of Vacuum Science and Technology

基　　金：国家市场监督管理总局科技项目(2020MK082)。

摘　　要：针对当前中国精密真空镀膜装备技术与国外差距甚远,存在核心技术缺失、技术发展方向不明确、研发意愿不足等问题,基于可视化技术分析真空镀膜装备国内外专利信息。探索数据处理过程中,通过字段创建与组合以可视化解析当前专利态势和技术,聚焦技术壁垒背景下光学领域磁控溅射(MS)与半导体领域原子层沉积(ALD)国外重点装备制造厂商的技术关注,挖掘出关键部件专利布局、技术功效、专利空白、比较优势等竞争信息,由桑基图、实物图、簇状气泡图等可视化图像直观展现分析成果,以期为中国真空镀膜装备制造企业技术创新思路借鉴、企业并购、技术合作、人才引进及产业相关政策制定提供参考策略。In view of the current gap in precision vacuum coating equipment technology between domestic and foreign countries, there are problems such as lack of core technology, unclear direction of technology development, and lack of willingness to research and develop, we analyzed the domestic and foreign patents information of vacuum coating equipment based on visualization technology. In the process of exploring data processing, field creation and combination are used to visually analyze the current patent situation and technology, focusing on the technical concerns of foreign key equipment manufacturers of magnetron sputtering(MS) in optical field and atomic layer deposition(ALD) in semiconductor field under the background of technical barriers. Mining competitive information such as patent layout of key components, technical efficacies, patent blanks and comparative advantages. Visualized images such as Sankey diagrams, physical diagrams, and clustered bubble diagrams are used to visually display the analysis results, in order to provide reference strategies for domestic vacuum coating equipment manufacturing enterprises to learn from technological innovation ideas, corporate mergers and acquisitions, technical cooperation, talent introduction, and industry-related policy formulation.

关 键 词：数据可视化 真空镀膜 专利竞争 技术功效 光学镀膜 半导体镀膜 

分 类 号：TB43[一般工业技术]