基于毫米级圆柱结构的柔性电容式压力传感器研究  

Research on Flexible Capacitive Pressure Sensor Based on Millimeter-Level Cylindrical Structure

作　　者：魏国 廖宁波[1,2] 章城 WEI Guo;LIAO Ningbo;ZHANG Cheng(College of Mechanical and Electrical Engineering,Wenzhou University,Zhejiang 325035,China;Zhejiang Key Laboratory of Laser Processing Robot,Laser Processing Robot Demonstration International Science and Technology Cooperation Base,Zhejiang 325035,China)

机构地区：[1]温州大学机电工程学院,浙江325035 [2]浙江省激光加工机器人重点实验室激光加工机器人示范型国际科技合作基地,浙江325035

出　　处：《真空科学与技术学报》2022年第6期462-468,共7页Chinese Journal of Vacuum Science and Technology

基　　金：浙江省自然科学基金项目(LQ20E050023);温州市基础性工业科技项目(G20190014)。

摘　　要：本文研究了具有毫米级圆柱结构的介质层对柔性电容压力传感器灵敏度的影响。设计的传感器使用聚四氟乙烯模具进行倒模、转移工艺制备,所得薄膜介质层排列整齐,形状较好。通过仿真和实验相结合的方法,研究圆柱介质层结构对传感器灵敏度的影响。根据仿真结果可知,传感器灵敏度由4.8×10^(-3)kPa^(-1)提升到1.2×10^(-2)kPa^(-1)。具体实验结果显示,传感器灵敏度由1.2×10^(-5)kPa^(-1)提升到1.2×10^(-4)kPa^(-1),仿真和实验结果均表明毫米级圆柱结构的介质层可以有效提高柔性电容式压力传感器的灵敏度。This paper studies the influence of a dielectric layer with a millimeter-level cylindrical structure on the sensitivity of a flexible capacitive pressure sensor.The designed sensor is prepared by pouring and transferring process using a polytetrafluoroethylene mold,and the obtained film dielectric layer is neatly arranged and has a good shape.The influence of the cylindrical dielectric layer structure on the sensitivity of the sensor is studied by a combination of simulation and experiment.According to the simulation results,the sensitivity of the sensor is increased from 4.8×10^(-3)kPa^(-3) to 1.2×10^(-2)kPa^(-1).The specific experimental results show that the sensitivity of the sensor is increased from 1.2×10^(-5) kPa^(-1) to 1.2×10^(-4) kPa^(-1).Both simulation and experimental results show that the dielectric layer of the millimeter-scale cylindrical structure can effectively improve the sensitivity of the flexible capacitive pressure sensor.

关 键 词：电容式 柔性传感器 聚二甲基硅氧烷 圆柱结构 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]