A fast scanning strategy based on trajectory shaping for atomic force microscopy  

作　　者：Yinan Wu Yingao Chang Yongchun Fang Zhi Fan 

机构地区：[1]Institute of Robotics and Automatic Information System,College of Artificial Intelligence,Nankai University,Tianjin 300350,China [2]Tianjin Key Laboratory of Intelligent Robotics,Nankai University,Tianjin 300350,China

出　　处：《Nano Research》2022年第7期6438-6446,共9页纳米研究（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.62003172,61633012,and 21933006).

摘　　要：To improve the scanning speed of an atomic force microscopy(AFM),a smooth scanning pattern is elaborately devised via trajectory shaping in this paper,so as to achieve fast imaging without hardware modification.Specifically,in the proposed scanning method,the piezoelectric actuator tracks a well-designed smooth periodic signal in x-direction,and simultaneously tracks a step signal in y-direction.The advantage of the proposed method is that it does not require additional data reprocessing to construct the morphology of the sample surface,while significantly increasing the scanning bandwidth restricted by the raster scanning method.Particularly,to directly utilize the height data collected by scanning to produce the sample morphology,the forward process in the common raster scanning mode is retained in the proposed method,the tracking signal in the forward process is thus set to a ramp function in x-direction.In addition,to ensure the continuity and smoothness of the entire tracking signal in x-direction,a segment of a sine curve is uniquely determined as the backward tracking signal by position and acceleration constraints,so as to ensure that the forward and backward curves are continuous and acceleration-continuous at the intersection point.Moreover,the frequency spectrum analysis of the designed smooth signal is carried out to exhibit the depressed amplitudes of high-frequency components,which demonstrates that the proposed method is able to reduce the resonance in AFM high-speed scanning,so as to improve the capacity of rapidly generating high-quality images.Finally,convincing comparison experiments are implemented to verify the imaging performance of the designed scanning algorithm.

关 键 词：atomic force microscopy fast scanning smooth signal trajectory shaping 

分 类 号：TH742[机械工程—光学工程] TB3[机械工程—仪器科学与技术]