Si-DLC films deposited by a novel method equipped with a co-potential auxiliary cathode for anti-corrosion and anti-wear application  

作　　者：Xubing Wei Shaomiao Shi Chuangming Ning Zhibin Lu Guangan Zhang 

机构地区：[1]State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Journal of Materials Science & Technology》2022年第14期114-128,共15页材料科学技术（英文版）

基　　金：financially supported by the National Key R&D Program of China(No.2018YFB0703801);the Sichuan Science and Technology Program(No.2019YFSY0012);the CAS"Light of West China"Program。

摘　　要：A novel DLC film deposition method was proposed to realize the deposition of DLC film on the surface of complex shaped workpiece.Meanwhile,Si-DLC film was deposited on the surface of M2 high-speed steel(HSS M2)and 304 stainless steel(304SS),and the microstructure,surface roughness,mechanical properties,corrosion resistance and tribological properties of Si-DLC films were characterized in detail.Results show that Si-DLC film at different axial positions of the auxiliary cathode possesses similar microstructure,film thickness and surface roughness,and the as-deposited Si-DLC film shows the low intrinsic stress of<0.3 GPa.Compared with the 304SS substrate,the Si-DLC film presents more noble corrosion potential,lower corrosion current density and higher polarization resistance,exhibiting higher corrosion resistance.Moreover,the Si-DLC film exhibits higher hardness,elastic factor and plastic factor than HSS M2 substrate and the corresponding adhesive strength is more than 10 N.The Si-DLC film sliding against GCr15 steel ball shows a lower friction coefficient than that of HSS M2 substrate and the wear rate of GCr15 steel ball sliding against the Si-DLC is lower than that of HSS M2 substrate.In addition,this novel method was used to deposit Si-DLC film on gears,drills and bearings without rotating sample racks.As a consequence,this method possesses great potential and can be generalized for the deposition of DLC film on the surface of complex shape workpiece.

关 键 词：Si-DLC film Co-potential auxiliary cathode Tribology Corrosion Complex shaped workpiece 

分 类 号：TB383.2[一般工业技术—材料科学与工程]