角位置误差对回转误差测量的影响规律研究  

Study on the influence law of angular position error on rotation error measurement

作　　者：张志[1,2] 夏仰球 米良[1,3] 周怡帆 谢罗峰[2] 殷鸣 ZHANG Zhi;XIA Yangqiu;MI Liang;ZHOU Yifan;XIE Luofeng;YIN Ming(Institute of Machinery Manufacturing Technology,CAEP,Mianyang 621900,China;School of Mechanical Engineering,Sichuan University,Chengdu 610065,China;National Machine Tool Production Quality Supervision Testing Center(Sichuan),Chengdu 610200,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900 [2]四川大学机械工程学院,四川成都610065 [3]国家机床产品质量监督检验中心(四川),四川成都610200

出　　处：《中国测试》2022年第7期23-29,共7页China Measurement & Test

基　　金：国防科工局技术基础科研(J0067-1922-FJC);四川省重大科技专项项目(2020ZDZX0003)。

摘　　要：由于编码器误差、安装误差、电机转矩波动以及环境扰动等不确定因素的存在,会造成旋转轴线转动速度波动从而带来动态角位置误差,而角位置误差会造成位移传感器产生测量误差,进而导致旋转轴线径向回转误差分离结果不准确。为识别角位置误差对旋转轴线回转误差测量的影响规律,首先,分析基于反转法的超精密径向回转误差测量原理,识别角位置误差对回转误差的影响机制;然后,建立角位置误差对传感器位移测量影响的数学模型,获得角度位置与位移测量误差之间的关系;接着,仿真分析角位置误差对位移测量误差和对径向回转误差分离结果的影响;最后,在一台标称回转误差为50 nm的超精密转台上进行试验验证。仿真结果和试验结果表明:标准球圆度误差及径向回转误差的测量误差将随着角位置误差的增大而增大,且对标准球圆度误差的影响较为显著。Uncertain factors such as encoder error,installation error,motor torque fluctuation and environmental disturbance will cause the rotation speed fluctuation of the rotating axis,which will bring the dynamic angular position error,and the angular position error will cause the measurement error of the displacement sensor,which will lead to the inaccurate separation result of the radial rotation error of the spindle.In order to identify the influence law of angular position error on the rotation error measurement of the rotating axis,Firstly,the principle of ultra-precision radial rotation error measurement based on reverse method is analyzed,and the influence mechanism of angular position error on displacement measurement is identified.Then,a mathematical model of the influence of the angular position error on the sensor displacement measurement is established,and the relationship between the angular position and the displacement measurement error is obtained.Then,the influence of angular position error on the separation results of displacement measurement error and radial rotation error is simulated and analyzed.Finally,the experimental verification is carried out on an ultra-precision turntable with a nominal rotation accuracy of 50 nm.Both simulation and test results show that the relative errors of the spherical roundness error and the radial rotation error increase monotonically with the angular position error.

关 键 词：超精密测量 角位置误差 径向回转误差 影响规律 

分 类 号：TH11[机械工程—机械设计及理论] TB9[一般工业技术—计量学]