温度对电弧离子镀CrN过程等离子体状态及涂层结构和力学性能的影响  

Effect of temperature on plasma state during arc ion plating and microstructure and mechanical properties of CrN coating prepared thereat

作　　者：曲帅杰 郭朝乾 杨昭[1] 代明江 林松盛 石倩 苏一凡 韦春贝 唐鹏 QU Shuaijie;GUO Chaoqian;YANG Zhao;DAI Mingjiang;LIN Songsheng;SHI QianSU Yifan;WEI Chunbei;TANG Peng(School of Materials Science and Engineering,Central South University,Changsha 410083,China;The Key Lab of Guangdong for Modern Surface Engineering Technology,National Engineering Laboratory for Modern Materials Surface Engineering Technology,Institute of New Materials,Guangdong Academy of Sciences,Guangzhou 510651,China)

机构地区：[1]中南大学材料科学与工程学院,湖南长沙410083 [2]广东省科学院新材料研究所现代材料表面工程技术国家工程实验室,广东省现代表面工程技术重点实验室,广东广州510651

出　　处：《电镀与涂饰》2022年第13期934-941,共8页Electroplating & Finishing

基　　金：国家自然科学基金(52101081);广东省重点领域研发计划项目(2020B010184001);广东省自然科学基金(2021A1515010692);广州市科技项目(202007020008,201904010261);广州市青年科技人才托举项目(QT20220101145)。

摘　　要：先采用发射光谱法分析了在不同温度下电弧离子镀CrN涂层过程中的等离子体状态,并在假设局部热力学平衡的条件下计算了等离子体密度,用玻尔兹曼作图法计算了等离子体温度。根据Cr靶弧光放电特点选择镀膜工艺,在不同温度下制备了CrN涂层,并研究了其微观结构和力学性能。结果表明:随着温度升高,光谱强度先升高后降低,在350℃下电弧离子镀时等离子体光谱强度、等离子体密度及等离子体温度均最高,所得CrN涂层最致密。450℃时所得CrN涂层的纳米硬度和弹性模量都最高,力学性能最优。The plasma state during the deposition of CrN coating by arc ion plating at different temperatures was diagnosed by optical emission spectroscopy.The plasma density was calculated under the assumption of local thermodynamic equilibrium,and the plasma temperature was deduced by Boltzmann plot method.The coating process was determined according to the arc-discharge characteristics of Cr target.CrN coatings were prepared at different temperatures and their microstructures and mechanical properties were studied.The results showed that the spectral intensity was increased initially and then decreased with the increasing of arc ion plating temperature.The CrN coating obtained at 350℃was the most compact due to the fact that the spectral intensity,density,and temperature of plasma were the highest during arc ion plating process.The CrN coating obtained at 450℃ had the best mechanical properties with the highest nanohardness and elastic modulus.

关 键 词：氮化铬 电弧离子镀 温度 等离子体 发射光谱 

分 类 号：TQ153.2[化学工程—电化学工业]