基体偏压对多弧离子镀制备CrAlN薄膜组织和性能的影响  

Effect of bias voltage on microstructure and properties of CrAlN film prepared by multi-arc ion plating

作　　者：付泽钰 王天国 FU Zeyu;WANG Tianguo(School of Materials Science and Engineering,Hubei University of Automotive Technology,Shiyan 442002,China)

机构地区：[1]湖北汽车工业学院材料科学与工程学院,湖北十堰442002

出　　处：《电镀与涂饰》2022年第13期942-947,共6页Electroplating & Finishing

基　　金：湖北省教育厅科学技术项目(Q20181802);湖北省高等学校优秀中青年科技创新团队计划项目(T201811)。

摘　　要：采用多弧离子镀技术在H13模具钢表面制备CrAlN薄膜,通过扫描电镜(SEM)和X射线衍射仪(XRD)研究了CrAlN薄膜的表面形貌与物相组成,测试了CrAlN薄膜的显微硬度及其与基材的结合力,使用箱式电阻炉考察了CrAlN薄膜在800℃下的抗氧化性能,通过动电位极化曲线测量分析了CrAlN薄膜的耐腐蚀性能。结果表明:随着偏压增大,CrAlN薄膜表面大颗粒先减少后增多,晶粒尺寸先减小后增大。CrAlN薄膜表面检测出CrN(200)、CrN(220)及AlN(101)衍射峰,且偏压变化不影响物相组成。随着偏压增大,CrAlN薄膜的力学性能、抗高温氧化性能及耐腐蚀性能先提高后降低。偏压为100 V时,CrAlN薄膜最均匀致密,表面大颗粒最少,显微硬度及膜基结合力最高(分别约为2300 HV和23 N),抗高温氧化及耐腐蚀性能最佳。A CrAlN film was prepared on the surface of H13 die steel by multi-arc ion plating technology.The surface morphology and phase constitution of CrAlN film were studied by scanning electron microscopy(SEM)and X-ray diffraction(XRD).The microhardness of CrAlN film and its adhesion to substrate were tested.The oxidation resistance of CrAlN film at 800℃ was examined in box resistance furnace.The corrosion resistance of CrAlN film was analyzed by potentiodynamic polarization curve measurement.The results showed that with the increasing of bias voltage,the grain size of CrAlN film and the large particles on its surface were decreased initially and then increased.The diffraction peaks of CrN(200),CrN(220),and AlN(101)were detected on the surface of CrAlN film,and the variation of bias voltage did not affect its phase constitution.The mechanical properties,high-temperature oxidation resistance,and corrosion resistance of CrAlN film were increased initially and then decreased with the increasing of bias voltage.The CrAlN film deposited at a bias voltage of 100 V had the least large particles on its surface,the most uniform and compact microstructure,the highest microhardness(about 2300 HV)and film-substrate adhesion(about 23 N),and the best resistance to high-temperature oxidation and corrosion.

关 键 词：磨具钢 氮化铬铝 薄膜 多弧离子镀 基体偏压 氧化 耐蚀性 

分 类 号：TG156.88[金属学及工艺—热处理] TB114.2[金属学及工艺—金属学]