钕铁硼磁体皮秒激光微加工实验  

Experiment of picosecond laser micro-machining on NdFeB magnet

作　　者：高连丛 陈翠芬 吕栋栋 欧佐元 彭鸿雁[1] GAO Lian-cong;CHEN Cui-fen;LV Dong-dong;OU Zuo-yuan;PENG Hong-yan(College of Physics and Electronic Engineering,Hainan Normal University,Haikou 570100,China)

机构地区：[1]海南师范大学物理与电子工程学院,海南海口570100

出　　处：《磁性材料及器件》2022年第4期93-97,共5页Journal of Magnetic Materials and Devices

基　　金：海南省大学生创新创业训练计划项目(S202111658033);海南师范大学大学生创新创业开放基金(榕树基金)项目(HSRS21-012)。

摘　　要：采用皮秒激光器作为加工光源通过环切法对钕铁硼永磁材料进行加工,并与传统的纳秒激光器加工效果作对比,探讨皮秒激光光斑在不同离焦量加工效果,利用扫描电子显微镜观察微孔的加工效果。基于实验确定的最佳工艺参数为:脉宽10 ps,功率20 W,离焦量0.2 mm,扫描速率为500 mm/s,重复频率500 kHz,激光入口直径47.9μm,出口23.0μm,材料厚度0.7 mm,孔锥度1.01°。皮秒激光加工方法是解决硬脆材料微孔加工的优质方法,这种微孔加工方法也可以延展到其他的材料加工之中。A picosecond laser is used as processing light source to process NdFeB permanent magnet material by cutting it in a circular way,and the processing effect is compared with the traditional nanosecond laser.The processing effect of picosecond laser spot in different defocus is discussed,and the processing effect of micro hole is observed by scanning electron microscope.Based on the experiment,the optimal process parameters were determined as follows:pulse width of 10 ps,power of 20 W,defocus of 0.2 mm,scanning rate of 500 mm/s,repetition rate of 500 kHz,laser inlet diameter of 47.9μm,outlet diameter of 23.0μm,material thickness of 0.7 mm,and hole taper of 1.01°.Picosecond laser processing method is proveed to be a high quality method to solve the hard and brittle material microhole processing,tand can also be extended to other materials processing.

关 键 词：钕铁硼永磁材料 激光微加工 皮秒激光器 加工效果 

分 类 号：TM273[一般工业技术—材料科学与工程] TG485[电气工程—电工理论与新技术]