Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space  

作　　者：Shang-Qi Kuang Bo-Chao Li Yi Wang Xue-Peng Gong Jing-Quan Lin 匡尚奇;李博超;王依;龚学鹏;林景全(School of Science,Changchun University of Science and Technology,Changchun 130022,China;Key Laboratory of Ultrafast and Extreme Ultraviolet Optics,Changchun University of Science and Technology,Changchun 130022,China;State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]School of Science,Changchun University of Science and Technology,Changchun 130022,China [2]Key Laboratory of Ultrafast and Extreme Ultraviolet Optics,Changchun University of Science and Technology,Changchun 130022,China [3]State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

出　　处：《Chinese Physics B》2022年第7期579-585,共7页中国物理B（英文版）

基　　金：the National Natural Science Foundation of China(Grant Nos.62175018,61905239,and 61974142);Jilin Scientific and Technological Development Plan,China(Grant Nos.20190201013JC and 20200401052GX)。

摘　　要：With the purpose of designing the extreme ultraviolet polarizer with many objectives,a combined application of multiobjective genetic algorithms is theoretically proposed.Owing to the multi-objective genetic algorithm,the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space,and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction.Compared with the conventional method of multilayer design,our method has a higher probability of achieving the optimal multilayer design.Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space,and our results demonstrate a potential application of our method in the designs of optical thin films.

关 键 词：extreme ultraviolet polarizer multilayer design multi-objective genetic algorithm 

分 类 号：TN23[电子电信—物理电子学]