可抑制端部效应的平面磁场式直线时栅位移传感器  

Planar magnetic field linear time-grating displacement sensor with end-effect suppression

作　　者：杨继森[1] 卢渝 吴灼 周润 张迪 Yang Jisen;Lu Yu;Wu Zhuo;Zhou Run;Zhang Di(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing Unirersity of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《仪器仪表学报》2022年第4期89-97,共9页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51205434,52175454);重庆市高等学校优秀人才支持计划;重庆理工大学研究生创新项目(clgycx 20203107)资助。

摘　　要：针对前期研制平面磁场式直线时栅位移传感器存在的端部效应致使匀速运动坐标系均匀度降低的问题,提出了一种抑制平面线圈端部效应的方法,构建均匀性更高的交变磁场,并研制出了一种可抑制端部效应的新型平面直线时栅位移传感器。建立了平面线圈励磁数学模型,分析端部效应对均匀磁场的影响程度,提出了双层互补式激励线圈结构抑制端部效应方案;建立了新型平面直线时栅位移测量模型,采用空间正交的双列激励单元,实现了行波信号的合成并通过仿真验证了方案的有效性;建立了仿真模型,分析端部效应对传感器测量精度的影响,并优化传感器参数;基于PCB工艺制造了量程为228 mm的新型传感器样机并与传统传感器样机展开了对比实验,实验结果表明,新型平面直线时栅位移传感器能够有效地抑制传感器的端部效应,提高测量精度,传感器对极内原始测量精度从±20μm提高到±10μm。Aiming at the problem that the uniformity of the uniform motion coordinate system is reduced due to the end effect of the planar magnetic field linear time-grid displacement sensor developed in the early stage, a method for suppressing the end effect of the planar coil is proposed, and an alternating magnetic field with higher uniformity is constructed. A new type of plane linear time grating displacement sensor that can suppress the end effect is developed. A mathematical model of planar coil excitation is formulated to analyze the influence of the end effect on the uniform magnetic field, and a double-layer complementary excitation coil structure is proposed to suppress the end effect. The dual-column excitation unit realizes the synthesis of travelling wave signals and verifies the effectiveness of the scheme through simulation. A simulation model to analyze the influence of the end effect on the measurement accuracy of the sensor is established, and the sensor parameters are optimized. Based on the PCB process, a new sensor prototype with a measuring range of 228 mm is fabricated and compared with the traditional sensor prototype. Experimental results show that the new planar linear time grating displacement sensor can effectively suppress the end effect of the sensor and improve the measurement accuracy. The intrapolar raw measurement accuracy is improved from ±20 μm to ±10 μm.

关 键 词：端部效应 均匀磁场 直线时栅位移传感器 误差特性 

分 类 号：TH712[机械工程—测试计量技术及仪器]