压电执行器的非对称动态迟滞特性建模研究  

Modeling of asymmetric dynamic hysteresis characteristics of piezoelectric actuator

作　　者：周民瑞 周振华[1,2] 刘鑫 曹太山[1,2] 李战慧 Zhou Minrui;Zhou Zhenhua;Liu Xin;Cao Taishan;Li Zhanhui(College of Automotite and Mechanical Engineering,Changsha University of Science and Technology,Changsha 410114,China;Hunan Prorincial Key laboralory of Ielligent Manufacturing Technology for High performance Mechanical Equipment,Changsha 410114,China)

机构地区：[1]长沙理工大学汽车与机械工程学院,长沙410114 [2]机械装备高性能智能制造关键技术湖南省重点实验室,长沙410114

出　　处：《仪器仪表学报》2022年第4期108-120,共13页Chinese Journal of Scientific Instrument

基　　金：湖南省杰出青年科学基金(2021JJ10040);湖南省自然科学基金(2021JJ30731);湖南省教育厅优青项目(21B0353);长沙市自然科学基金(kq2014099)项目资助。

摘　　要：传统Bouc-Wen模型难以精确表征压电执行器固有非对称率相关动态迟滞非线性,因此提出一种广义Bouc-Wen(GBW)迟滞模型用于精确表征压电执行器的迟滞非线性。首先,基于传统Bouc-Wen迟滞模型引入两项非对称项和二阶IIR滤波器表征压电执行器非对称迟滞及高频相位滞后特性,进一步分析了模型参数值与频率变化规律并确定了模型的率相关参数。然后,搭建了基于NI CompactRIO测控系统的压电执行器精密定位实验平台,通过粒子群优化算法完成GBW模型的参数辨识,并对提出的GBW模型进行实验验证。实验结果表明,对于变频率正弦激励信号,GBW模型的最大误差为0.190 6μm,均方根误差为0.043 1μm仅占压电执行器位移行程的0.65%,相较于传统Bouc-Wen(CBW)模型及改进Bouc-Wen(EBW)模型分别下降了82.07%和62.10%。对比CBW模型和EBW模型,所提出的GBW模型精度和宽频性能均有显著提升,并且解析逆模型存在易于控制器设计,有助于实现压电执行器在超精密仪器设备中宽频、高速精密定位。A generalized Bouc-Wen(GBW) hysteresis model is proposed to accurately characterize the hysteresis nonlinearity of the piezoelectric actuator, since the classical Bouc-Wen hysteresis model cannot accurately characterize the inherent asymmetric frequency-dependent dynamic hysteresis nonlinearity of piezoelectric actuators. Firstly, based on the classical Bouc-Wen hysteresis model, two asymmetric terms and a second-order IIR filter are introduced to characterize the asymmetric hysteresis and high-frequency phase hysteresis of the piezoelectric actuator, and further analyze the model parameter values with respect to the frequency variation law to determine the frequency-dependent parameters of the model. Then, the experimental platform of precision positioning of the piezoelectric actuator based on NI CompactRIO measurement and control system is built, and the parameters of the GBW model are identified by the particle swarm optimization algorithm and the proposed GBW model is evaluated experimentally. Experimental results show that the maximum error of the GBW model is 0.190 6 μm and the root mean square error is 0.043 1 μm for the variable frequency sinusoidal excitation signal, which is only 0.65% of the displacement range of the piezoelectric actuator, with a decrease of 82.07% and 62.10% compared to the classical Bouc-Wen(CBW) model and the enhanced Bouc-Wen(EBW) model, respectively. Compared with the CBW model and the EBW model, the proposed GBW model significantly improves the model accuracy and broadband performance, and the existence of the analytical inverse model is easy for controller design, which helps to realize broadband and high-speed precision positioning of the piezoelectric actuator in ultra-precision instruments and equipments.

关 键 词：压电执行器 非对称迟滞 率相关动态迟滞 广义Bouc-Wen模型 

分 类 号：TH701[机械工程—仪器科学与技术] TN384[机械工程—精密仪器及机械]