WO_(3)对零膨胀锂铝硅封接玻璃流动性的影响与作用机理  

Effect and Mechanism of WO_(3) on Fluidity of Zero Expansion Lithium Aluminum Silicon Sealing Glass

作　　者：郭宏伟[1] 李荣悦 CHI Longxing 刘帅 王毅[1] 白赟 GUO Hongwei;LI Rongyue;CHI Longxing;LIU Shuai;WANG Yi;BAI Yun(School of Materials Science and Engineering,Shaanxi University of Science and Technology,Xi’an 710021,China;Department of Materials Science and Engineering,University of Toronto,Toronto M5S3E4,Canada)

机构地区：[1]陕西科技大学材料科学与工程学院,西安710021 [2]多伦多大学材料科学与工程系,多伦多M5S3E4

出　　处：《硅酸盐通报》2022年第7期2511-2517,2541,共8页Bulletin of the Chinese Ceramic Society

基　　金：国家重点研发计划(2017YFB0310201)。

摘　　要：密封连接石英玻璃被广泛应用于航空航天、半导体加工以及微机电系统真空连接等领域。改进的低膨胀Li_(2)O-Al_(2)O_(3)-SiO_(2)(LAS)系微晶玻璃可以用于封接石英玻璃,但存在流动性不佳的难题。本文通过掺入WO_(3)对LAS系微晶玻璃进行改性,利用线膨胀系数分析仪、差示扫描量热仪、X射线衍射仪、高温烧结影像仪、扫描电镜,研究了掺入WO_(3)后LAS玻璃封接石英玻璃的机理。结果表明:WO_(3)对LAS玻璃的析晶产生先增强后削弱的影响;WO_(3)掺量越大,热膨胀系数越大,当掺量达到5.0%(质量分数)时,热膨胀系数提升至5.69×10^(-7)℃^(-1);流动性与润湿性随着掺量增加而提升,铺展面积随掺量增加而增大,润湿角随掺量增加而减小,有效改善了LAS玻璃本身流动性不足的问题;LAS玻璃与石英玻璃之间主要是通过化学元素迁移实现封接。Sealing connection quartz glass is widely used in aerospace,semiconductor processing and micro-electro-mechanical system vacuum connection,etc.The improved low-expansion Li_(2)O-Al_(2)O_(3)-SiO_(2)(LAS)glass-ceramics can be used to seal quartz glass,but there is a problem of poor fluidity.LAS glass-ceramics were modified by incorporating WO_(3).The mechanism of LAS glass sealing quartz glass after incorporating WO_(3) was investigated by using linear expansion coefficient analyzer,differential scanning calorimeter,X-ray diffractometer,high temperature sintering imager and scanning electron microscope.The results show that the effect of WO_(3) on the crystallization of LAS glass is strengthening first and then weakening.The more WO_(3) is added,the greater the thermal expansion coefficient is.When the amount of WO_(3) reaches 5.0%(mass fraction),the thermal expansion coefficient increases to 5.69×10^(-7)℃^(-1).The fluidity and wettability develop with the enlarge of the external doping amount.The spreading area extends with the increase of the external doping amount.The wetting angle decreases with the expand of the external doping amount,which effectively improves the problem of insufficient fluidity of LAS glass itself.The sealing between LAS glass and quartz glass is mainly achieved by the migration of chemical elements.

关 键 词：石英玻璃 微晶玻璃 WO_(3) 流动性 封接 表面张力 

分 类 号：TQ171[化学工程—玻璃工业]