Influence of Parameters in the Design of a Faceted Structure for Incoherent Beam Shaping  

作　　者：Lihong Liu Thierry Engel- Huwen Ding Yuanzhi Cui Jing Zhang Yayi Wei Manuel Flury 

机构地区：[1]Institute of Microelectronics,Chinese Academy of Sciences,Beijing,China,100029 [2]Laboratoire des Sciences de llngenieur,de I'lnformatique et de I'lmagerie(Icube),UMR CNRS 7357,300 Boulevard Sebastien Brant,CS10413,67412 Illkirch Cedex,France [3]INSA de Strasbourg,24 Boulevard de la Victoire,67084 Strasbourg Cedex,France [4]University of Chinese Academy of Sciences,Beijing,China,101408 [5]International School for Optoelectronic Engineering,Qilu University of Technology(Shandong Academy of Sciences),No.3501 University Road,Jinan,Shandong,China,250353 [6]North China University of Technology,Beijing,China,100144

出　　处：《Journal of Microelectronic Manufacturing》2021年第4期1-11,共11页微电子制造学报（英文）

基　　金：supported by Natural Science Foundation of Shandong Province,China(No.ZR2019BF033).

摘　　要：A reflective faceted structure is proposed to reshaping an incoherent light beam into two focalized spots-To obtain the desired irradiance distribution on a detector,custom optimization function is written,and the two dimensional tilt angles of each facet are optimized automatically in a pure non-sequential mode in Zemax OpticStudio 16.The result is also confirmed inside LightTools&2 from Synopsys.For measuring the quality of the optimization result in the case of two spots focalization,four factors including efficiency on the detector,uniformity,the root mean square error and the correlation coefficient are calculated.These four factors are used to evaluate the influence of several parameters on the irradiance distribution.These parameters include the incidence angle,the divergence angle,the facet size,the source type and the resolution of the facet angular positions.Finally,an analysis of those parameters is made and the performance of this type of component is demonstrated.

关 键 词：Incoherent beam shaping micro lens array custom optimization 

分 类 号：O57[理学—粒子物理与原子核物理]