基于数字微镜的电感耦合等离子体发射光谱检测技术研究  

Research on Detection Technology of Inductively Coupled Plasma Optical Emission Spectrometer Based on Digital Micromirror Device

作　　者：李颖超 李春生[1] 王宏霞[1] 姜闻宇 司刘震 杨雨晴 杨光[1] 田地[1] LI Ying-Chao;LI Chun-Sheng;WANG Hong-Xia;JIANG Wen-Yu;SI Liu-Zhen;YANG Yu-Qing;YANG Guang;TIAN Di(College of Instrumentation&Electrical Engineering,Jilin University,Changchun 130026,China)

机构地区：[1]吉林大学仪器科学与电气工程学院,长春130026

出　　处：《分析化学》2022年第8期1150-1157,共8页Chinese Journal of Analytical Chemistry

基　　金：国家重点研发计划重大科学仪器设备开发专项基金项目(No.2016YFF0103303)资助。

摘　　要：基于数字微镜(DMD)搭建了新型电感耦合等离子体发射光谱仪(ICP-OES)实验系统,此系统由光源系统、进样系统、中阶梯光栅光谱仪及控制系统等部分组成。中阶梯光栅光谱仪采用中阶梯光栅与反射式棱镜交叉色散,数字微镜作为空间光调制器,光电倍增管(PMT)作为检测器。对此实验系统的DMD控制参数、高频发生器功率与载气流量的工作参数进行了优化。检测了Mg元素和Ca元素的发射谱线,得到Mg的检出限为0.05μg/mL,Ca的检出限为0.01μg/mL。对标准水质镁与水质钙溶液进行检测分析,Mg的加标回收率为98%~103%,RSDs为0.9%~1.8%;Ca的加标回收率为89%~93%,RSDs为0.8%~0.9%。实验结果表明,搭建的基于DMD的ICP-OES实验系统初步实现了水质样品中元素的检测分析功能,具有测量方式灵活、检测速度快等特点。An experimental system on the basis of inductively coupled plasma optical emission spectrometer(ICP-OES)was built based on digital micromirror device(DMD),which was consisted of light source system,sample introduction system,echelle grating spectrometer and control system.The echelle grating spectrometer used echelle grating and reflective prism as the cross-dispersion elements,DMD as the spatial light modulator,and photomultiplier tubes(PMT)as the detector.The working parameters of the experimental system including control parameters of DMD,power of high frequency generator and flow rate of carrier gas were optimized.According to the experimental results of the emission lines,the limit of detection(LOD)was less than 0.05μg/mL for Mg and 0.01μg/mL for Ca,respectively.By analyzing the corresponding standard solution sample,the spiked recoveries and the RSDs were 98%-103%and 0.9%-1.8%for Mg,and 89%-93%and 0.8%-0.9%for Ca,respectively.The experimental results showed that the ICP-OES based on DMD had the characteristics of flexible measurement and fast detection,realizing the function of detection and analysis.

关 键 词：电感耦合等离子体发射光谱仪 数字微镜 中阶梯光栅光谱仪 元素分析 

分 类 号：X832[环境科学与工程—环境工程] O657.31[理学—分析化学]