高陡度薄壁光学零件在位测量与评价方法研究  

On-machine measurement and evaluation method of thin-walled optical parts with high gradient

作　　者：王贵林 唐力 黎寿山 叶波 WANG Guilin;TANG Li;LI Shoushan;YE Bo(Academy of Hi-Tech Research,Hunan Institute of Traffic Engineering,Changsha 421001,China;AECC South Industry Co.,Ltd.,Zhuzhou 412002,China)

机构地区：[1]湖南交通工程学院高科技研究院,湖南长沙421001 [2]中国航发南方工业有限公司,湖南株洲412002

出　　处：《应用光学》2022年第4期766-771,818,共7页Journal of Applied Optics

基　　金：航空发动机复杂结构钛合金薄壁件超精密切削与稳定性技术研究(2020JJ6092)。

摘　　要：为了满足空气动力学要求,采用共形薄壁结构的整流罩或光学窗口成为未来高速飞行器的发展趋势。但是这类零件在加工过程中,切削力会随着轴向位置发生改变,一次加工难以达到精度要求,需要通过在位测量、补偿加工来控制切削力变化所引起的面形误差。以超精密车床作为运动平台,设计高陡度薄壁光学零件的在位检测系统,研究测点分布的优化算法,实现测量效率和测量精度的统一;建立热变形误差修正模型,提高高陡度薄壁光学零件在位测量的精度。针对某型高陡度薄壁头罩,通过在位测量为补偿加工提供指导,将头罩表面误差由峰谷比(peak-tovalley,PV)3.1μm控制到PV 0.7μm,将同轴度控制到1.02μm,满足光学系统的性能要求。In order to meet the aerodynamic requirements,the dome or optical window with conformal thin-walled structure has become the development trend of high-speed aircraft in the future.However,the cutting force will change with the axial position in the machining process of such parts,and one-time machining is difficult to meet the accuracy requirements.It is necessary to control the surface error caused by the change of cutting force by on-machine measurement and compensating machining.Taking the ultra-precision lathe as the motion platform,the on-machine measurement system was designed for thin-walled optical parts with high steepness,the optimization algorithm was studied for the distribution of measuring points,and the measuring efficiency and accuracy were realized at the same time.The correction model for thermal deformation error was established to improve the accuracy of on-machine measurement for thin-walled optical parts with high steepness.The on-machine measurement was used to provide guidance for compensating machining of a thin-walled dome,the surface error was reduced from PV(peak to valley)3.1μm to PV 0.7μm,the coaxiality is controlled to 1.02μm,and the performance requirements are satisfied for optical system.

关 键 词：高陡度光学零件 共形头罩 在位测量 补偿加工 同轴度 

分 类 号：TN214[电子电信—物理电子学] TH741[机械工程—光学工程]