On-chip short-wave infrared multispectral detector based on integrated Fabry–Perot microcavities array  

作　　者：Zhiyi Xuan Qingquan Liu Zhuangzhuang Cui Songlei Huang Bo Yang Chenlu Li Shaowei Wang Wei Lu 玄志一;刘清权;崔壮壮;黄松垒;杨波;李辰璐;王少伟;陆卫(State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Bejing 100049,China;School of Physical Science and Technology,Shanghai Tech University,Shanghai 201210,China;Shanghai Research Center for Quantum Sciences,Shanghai 201315,China;State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Nantong Academy of Intelligent Sensing,Nantong 226000,China)

机构地区：[1]State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China [2]University of Chinese Academy of Sciences,Bejing 100049,China [3]School of Physical Science and Technology,Shanghai Tech University,Shanghai 201210,China [4]Shanghai Research Center for Quantum Sciences,Shanghai 201315,China [5]State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China [6]Nantong Academy of Intelligent Sensing,Nantong 226000,China

出　　处：《Chinese Optics Letters》2022年第6期25-29,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(NSFC)(No.11874376);Shanghai Science and Technology Foundations(Nos.19DZ2293400 and 19ZR1465900);Shanghai Municipal Science and Technology Major Project(No.2019SHZDZX01);Chinese Academy of Sciences President’s International Fellowship Initiative(No.2021PT0007)。

摘　　要：We demonstrate an ultra-compact short-wave infrared[SWIR]multispectral detector chip by monolithically integrating the narrowband Fabry–Perot microcavities array with the In Ga As detector focal plane array.A 16-channel SWIR multispectral detector has been fabricated for demonstration.Sixteen different narrowband response spectra are acquired on a 64×64 pixels detector chip by four times combinatorial etching processes.The peak of the response spectra varies from1450 to 1666 nm with full width at half-maximum of 24 nm on average.The size of the SWIR multispectral detection system is remarkably reduced to a 2 mm^(2) detector chip.

关 键 词：short-wave infrared DETECTOR multi-spectra MICRO-CAVITY ON-CHIP 

分 类 号：TN215[电子电信—物理电子学]