非对称扩散工艺制备近化学计量比钽酸锂晶体的研究  

Preparation of Near Stoichiometric Lithium Tantalate Crystal by Asymmetric Diffusion Technique

作　　者：杨金凤 商继芳[3] 李清连 杨亚林[1] 徐军 付主木 孙军 YANG Jinfeng;SHANG Jifang;LI Qinglian;YANG Yalin;XU Jun;FU Zhumu;SUN Jun(Henan Costar Group Co.,Ltd.,Nanyang 473000,China;College of Information Engineering,Henan University of Science and Technology,Luoyang 471023,China;Henan Key Laboratory of Electronic Ceramic Materials and Application,College of Materials Engineering,Henan University of Engineering,Zhengzhou 451191,China;School of Physics,Nankai University,Tianjin 300071,China)

机构地区：[1]河南中光学集团有限公司,南阳473000 [2]河南科技大学信息工程学院,洛阳471023 [3]河南工程学院材料工程学院,河南省电子陶瓷材料与应用重点实验室,郑州451191 [4]南开大学物理科学学院,天津300071

出　　处：《人工晶体学报》2022年第7期1141-1146,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金(61705059,51902087);河南省青年人才托举工程项目(2020HYTP004,2021HYTP004);河南省科技攻关项目(202102210023)。

摘　　要：利用气相平衡输运法制备的近化学计量比钽酸锂晶体质量好,制备工艺简单,但受固体扩散速率低的影响,该方法较难制备大厚度晶体。本文基于钽酸锂晶体的扩散机制,采用待扩散晶片一侧为富锂气氛,另一侧为同成分气氛的非对称扩散工艺,对钽酸锂晶体进行了扩散处理,并对组分和畴反转电场进行表征。结果表明,非对称扩散工艺为反位钽离子的扩散提供了通道,提高了晶体中反位钽离子和锂离子的扩散速率,有利于制备大厚度近化学计量比钽酸锂晶体。Vapor equilibrium transport method is used to prepare near stoichiometric lithium tantalate crystals with high quality.However,it is difficult to prepare large-thickness crystals by this method due to its low solid diffusion rate.In this paper,based on the diffusion mechanism of lithium tantalate crystal,the diffusion of lithium tantalate crystal was carried out by asymmetric diffusion process with lithium rich atmosphere on one side of the wafer and congruent composition atmosphere on the other side.The composition and domain inversion field were characterized.The results show that the asymmetric diffusion technique provides a channel for the diffusion of anti-tantalum ion and increases the diffusion rate of anti-tantalum ion and lithium ion in the crystal,which is beneficial to the preparation of large-thickness near stoichiometric lithium tantalate crystal.

关 键 词：近化学计量比 钽酸锂晶体 气相平衡输运法 非对称扩散工艺 富锂气氛 扩散速率 同成分 

分 类 号：O791[理学—晶体学]