α-Al_(2)O_(3)基CVD复合涂层的研究进展  

State of the Art in α-Al_(2)O_(3)-base Composite Coatings by Chemical Vapor Deposition

作　　者：朱骥飞 张立[1] 殷磊 顾景洪 Zhu Jifei;Zhang Li;Yin Lei;Gu Jinghong(State Key Laboratory of Powder Metallurgy,Central South University,Changsha Hunan 410083,China;Ganzhou Achteck Tool Technology Co.,Ltd.,Ganzhou Jiangxi 341000,China)

机构地区：[1]中南大学粉末冶金国家重点实验室,长沙410083 [2]赣州澳克泰工具技术有限公司,赣州341000

出　　处：《硬质合金》2022年第3期211-218,共8页Cemented Carbides

基　　金：中南大学大型仪器设备共享基金项目《α-Al_(2)O_(3)基CVD复合涂层硬质合金中涂层晶体生长调控机理》(2022028);赣州市科技计划项目《化学气相沉积定向生长Al_(2)O_(3)涂层开发》(2020081);中国工程院咨询研究项目《粉末冶金2035发展战略研究》(2019-XZ-9)。

摘　　要：切削刀具CVD涂层广泛采用TiN/MT-TiCN/Ti(Al)CNO/α-Al_(2)O_(3)/TiN多层复合结构(MT:中温),简称α-Al_(2)O_(3)基复合涂层。MT-TiCN涂层晶粒度调控和α-Al_(2)O_(3)涂层晶体定向生长调控是提高CVD涂层刀具性能的重要途径,也是目前切削刀具CVD涂层的研究热点。MT-TiCN涂层的晶粒度调控可以通过调控涂层沉积过程中的温度和各种工艺气体的分压实现,也能通过元素掺杂实现。其中,氧元素掺杂是一种简便且可控的细化MT-TiCN晶粒度的方法,能有效提高MT-TiCN涂层性能。α-Al_(2)O_(3)涂层的晶体定向生长主要通过调控过渡层、α-Al_(2)O_(3)晶体形核以及α-Al_(2)O_(3)晶体生长过程实现。由于能显著提高刀具切削性能,(001)织构α-Al_(2)O_(3)涂层得到了国内外研究者的重点关注。目前,氧掺杂调控MT-TiCN涂层晶粒度的机理和α-Al_(2)O_(3)涂层晶体定向生长调控的机理研究尚有待深入研究。The multilayer composite structure of TiN/MT-TiCN/Ti(Al)CNO/α-Al_(2)O_(3)/TiN(MT:medium temperature)is widely used in the chemical vapor deposition(CVD)coatings on cutting tools,referred to as α-Al_(2)O_(3)-base composite coating.The grain size regulation of MT-TiCN coatings and the crystal orientated growth regulation of α-Al_(2)O_(3) coatings are important means to improve the wear resistance of the cutting tools with CVD coatings,and they are also the research focus of CVD coatings on cutting tools.The grain size of MT-TiCN coatings can be regulated by adjusting the temperature and the partial pressure of various process gases during coating deposition and by element doping.Among them,oxygen doping is a simple and controllable method to refine the grain size of MT-TiCN,and it can effectively enhance the performance of MT-TiCN coatings.The crystal orientated growth ofα-Al_(2)O_(3) coatings can be realized by regulating the transition layer,the crystal nucleation,and the crystal growth process of α-Al_(2)O_(3).The(001)texture of α-Al_(2)O_(3) coatings has been paid much attention by researchers because it can significantly improve the cutting performance of tools.At present,the mechanism of regulating the grain size of MT-TiCN coatings by oxygen doping and the mechanism of crystal orientated growth regulation of α-Al_(2)O_(3) coatings still require in-depth research.

关 键 词：硬质合金刀具 涂层 化学气相沉积 MT-TiCN Al_(2)O_(3) 

分 类 号：TG174.4[金属学及工艺—金属表面处理]