平晶在检定千分尺测量面平面度和平行度中的应用及探讨  

Application and Discussion of Optical Flat in Measuring Plane Flatness and Parallelism of Micrometer

作　　者：李昕[1] 赵蓉蓉[1] LI Xin;ZHAO Rongrong

机构地区：[1]中国飞行试验研究院计量中心

出　　处：《计量与测试技术》2022年第7期79-81,共3页Metrology & Measurement Technique

摘　　要：本文结合光波干涉法测量原理,对平晶在检定千分尺测量面平面度和平行度中的应用及方法进行探讨,包括判定规则、计算方法、检定步骤等,使检定工作具有可操作性和高效性,从而保证科研生产过程的产品质量。In this paper,combined with the measurement principle of light wave interferometry,the application and method of the optical flat measuring plane flatness and parallelism of micrometer are discussed,including the determination rules,calculation methods,verification steps,etc.,so that there is operability and efficiency during verification work,so as to ensure the product quality of the scientific research and production process.

关 键 词：光波干涉法 平面平晶 平行平晶 

分 类 号：P221[天文地球—大地测量学与测量工程]