基于光谱技术的精密光学元件表面缺陷面积测量  

Measurement of the surface defect area of precision optics based on spectroscopic technology

作　　者：张兴娇 文如泉 李伯勋 ZHANG Xingjiao;WEN Ruquan;LI Boxun(School of Mechanical and Electronic Engineering,Pingxiang University,Pingxiang Jiangxi 337000,China)

机构地区：[1]萍乡学院机械电子工程学院,江西萍乡337000

出　　处：《激光杂志》2022年第7期200-204,共5页Laser Journal

基　　金：江西省科技厅重点研发计划(No.20203BBE53053);江西省教育厅教改课题(No.JXJG-16-22-4)。

摘　　要：为降低多种因素影响导致的精密光学元件表面缺陷面积测量结果不稳定性的问题,研究基于光谱技术的精密光学元件表面缺陷面积测量方法。选取精密光学元件钕玻璃板为测试样品,搭建多光谱冠层成像仪装置测量台,选择指定样品表面缺陷图像光谱并将其融合,由指定波段的光谱图像分量构成样品表面缺陷图像,重构多光谱图像,通过光线跟踪算法获取样品表面缺陷面积测量结果。实验分析可知:光谱波段范围为365 nm~550 nm范围内,可保证最佳测量结果,并且测量过程中激光发射角度控制在50°以内,可保证光谱仪对样品表面缺陷面积的测量准确性,测量控制点大小对于样品表面缺陷面积的测量准确性影响较小,可忽略不计。In order to reduce the instability of measurement results of surface defect area of precision optical elements caused by various factors,the method of measuring the surface defect area of precision optical elements based on spectroscopic technology was studied.Select the neodymium glass plate of the precision optical element as the test sample,build the multi-spectral canopy imager device measurement platform,select and fuse the spectra of the surface defect image of the specified sample,and the spectroscopic image component of the specified band constitutes the surface defect image of the sample.Spectral image,through the ray tracing algorithm to obtain the measurement results of the surface defect area of the sample.Experimental analysis shows that the spectral band range is 365 nm~550 nm,which can ensure the best measurement results,and the laser emission angle is controlled within 50°during the measurement process,which can ensure the accuracy of the spectrometer to measure the surface defect area of the sample,and the measurement control point The size has little effect on the measurement accuracy of the surface defect area of the sample and can be ignored.

关 键 词：光谱技术 精密光学元件 表面缺陷 面积测量 光谱波段 图像重构 

分 类 号：TN247[电子电信—物理电子学]