The mechanism study of low-pressure air plasma cleaning on large-aperture optical surface unraveled by experiment and reactive molecular dynamics simulation  

作　　者：Yuhai LI Qingshun BAI Yuheng GUAN Hao LIU Peng ZHANG Buerlike BATELIBIEKE Rongqi SHEN Lihua LU Xiaodong YUAN Xinxiang MIAO Wei HAN Caizhen YAO 李玉海;白清顺;关宇珩;刘昊;张鹏;巴特勒·别克;沈荣琦;卢礼华;袁晓东;苗心向;韩伟;姚彩珍(School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150000,People's Republic of China;Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900,People's Republic of China;Chongqing Research Institute,Harbin Institute of Technology,Chongqing 401135,People's Republic of China)

机构地区：[1]School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150000,People's Republic of China [2]Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900,People's Republic of China [3]Chongqing Research Institute,Harbin Institute of Technology,Chongqing 401135,People's Republic of China

出　　处：《Plasma Science and Technology》2022年第6期77-87,共11页等离子体科学和技术（英文版）

基　　金：the Joint Funds of National Natural Science Foundation of China and China Academy of Engineering Physics(NSAF)(No.U2030109);National Natural Science Foundation of China(No.52075129)。

摘　　要：Low-pressure air plasma cleaning is an effective method for removing organic contaminants on large-aperture optical components in situ in the inertial confinement fusion facility.Chemical reactions play a significant role in plasma cleaning,which is a complex process involving abundant bond cleavage and species generation.In this work,experiments and reactive molecular dynamics simulations were carried out to unravel the reaction mechanism between the benchmark organic contaminants of dibutyl phthalate and air plasma.The optical emission spectroscopy was used to study the overall evolution behaviors of excited molecular species and radical signals from air plasma as a reference to simulations.Detailed reaction pathways were revealed and characterized,and specific intermediate radicals and products were analyzed during experiments and simulation.The reactive species in the air plasma,such as O,HO_(2)and O_(3)radicals,played a crucial role in cleaving organic molecular structures.Together,our findings provide an atomic-level understanding of complex reaction processes of low-pressure air plasma cleaning mechanisms and are essential for its application in industrial plasma cleaning.

关 键 词：organic contaminants large-aperture optical components low-pressure air plasma plasma cleaning reactive species reactive molecular dynamics 

分 类 号：O539[理学—等离子体物理]